Problem epi2 SNF 2011-10-14 16:16:00: HCL Flow Deviation

edfei at snf.stanford.edu edfei at snf.stanford.edu
Fri Oct 14 16:16:01 PDT 2011


Came by to edit recipes and found an error of HCL flow deviation in Chamber A by 16%.  It seems to have shut down the chamber and put it in cold idle




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