Problem epi2 SNF 2011-10-15 10:55:01: HCl flow deviation error during Ge etch coat

dongrip at snf.stanford.edu dongrip at snf.stanford.edu
Sat Oct 15 10:55:01 PDT 2011


In step 8, HCL flow can't reach the target value of 900 sccm within the given time. It is highly unlikely to be related to the amount of HCL cylinder, because other steps are totally fine. If the set pt of HCL flow rate changes to 800 sccm temporarily, everything is fine (no flow deviation and 450 torr pressure level is also maintained). Anyway, currently the set pts of HCL flow in the step 8 and step 9 are back to the original value, 900 sccm. But, the flow deviation error again occurs.




More information about the epi2-pcs mailing list