Problem epi2 SNF 2011-10-14 16:16:00: HCL Flow Deviation
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Mon Oct 17 07:33:29 PDT 2011
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Problem epi2 SNF 2011-10-14 16:16:00: HCL Flow Deviation
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Problem epi2 SNF 2011-10-15 10:55:01: HCl flow deviation error during Ge etch coat
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Ran GE Etch coat no problem
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Problem epi2 SNF 2011-10-14 16:16:00: HCL Flow Deviation
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Problem epi2 SNF 2011-10-15 10:55:01: HCl flow deviation error during Ge etch coat
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