Shutdown epi2 SNF 2011-10-19 06:21:40: Gas tie ins

maurice at snf.stanford.edu maurice at snf.stanford.edu
Wed Oct 19 18:18:13 PDT 2011


SiH4 looks ok after gas tie in.
Ran " Encap seed only"  recipe  (SiH4 dep at 800c for 120sec)
 




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