Shutdown epi2 SNF 2011-10-20 14:45:40: wafer loading error
seymour at snf.stanford.edu
seymour at snf.stanford.edu
Thu Oct 20 14:45:40 PDT 2011
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Comment epi2 SNF 2011-10-20 07:16:42: new germane cylinder online
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Shutdown epi2 SNF 2011-10-20 14:45:40: wafer loading error
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Shutdown epi2 SNF 2011-10-20 14:45:40: wafer loading error
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