Shutdown epi2 SNF 2011-10-20 14:45:40: wafer loading error
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Thu Oct 20 16:35:21 PDT 2011
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Shutdown epi2 SNF 2011-10-20 14:45:40: wafer loading error
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Problem epi2 SNF 2011-10-21 14:58:31: ChA error
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put transfer chamber online
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Shutdown epi2 SNF 2011-10-20 14:45:40: wafer loading error
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Problem epi2 SNF 2011-10-21 14:58:31: ChA error
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