Problem epi2 SNF 2011-10-21 14:58:31: ChA error

eldwin at snf.stanford.edu eldwin at snf.stanford.edu
Fri Oct 21 14:58:32 PDT 2011


ChA is highlight in red and gives the error:
"Ch A main scrubber fault - manual gas flows not allowed"
Tried to reset chamber but error reappears.




More information about the epi2-pcs mailing list