Problem epi2 SNF 2011-10-24 17:13:48: dirts left on the backside of the wafers

wangss at snf.stanford.edu wangss at snf.stanford.edu
Mon Oct 24 17:13:49 PDT 2011


Ran 4 wafers. They all have big dirts on the back of the wafers. Might need to clean the chamber.




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