Problem epi2 SNF 2011-10-24 17:13:48: dirts left on the backside of the wafers

wangss at snf.stanford.edu wangss at snf.stanford.edu
Mon Oct 24 17:13:49 PDT 2011

Previous message: Comment epi2 SNF 2011-10-24 17:12:15:
Next message: Problem epi2 SNF 2011-10-24 17:13:48: dirts left on the backside of the wafers
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Ran 4 wafers. They all have big dirts on the back of the wafers. Might need to clean the chamber.

Previous message: Comment epi2 SNF 2011-10-24 17:12:15:
Next message: Problem epi2 SNF 2011-10-24 17:13:48: dirts left on the backside of the wafers
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the epi2-pcs mailing list