Problem epi2 SNF 2011-10-25 09:35:42: chA pressure deviation

ehe at snf.stanford.edu ehe at snf.stanford.edu
Tue Oct 25 09:35:42 PDT 2011

Previous message: Problem epi2 SNF 2011-10-24 17:13:48: dirts left on the backside of the wafers
Next message: Problem epi2 SNF 2011-10-25 09:35:42: chA pressure deviation
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

during etchback  - kicked chamber into isolation and prevented further recipe progress at 4am.

Previous message: Problem epi2 SNF 2011-10-24 17:13:48: dirts left on the backside of the wafers
Next message: Problem epi2 SNF 2011-10-25 09:35:42: chA pressure deviation
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the epi2-pcs mailing list