Shutdown epi2 SNF 2011-10-25 09:40:54: serious problem

ehe at ehe at
Tue Oct 25 09:40:54 PDT 2011

Wafer came out umacceptably hazy. Running same recipe as came out clear (with light haze in center) last week. Every time this has happened in past there have either been lamps out or a coated dome. Please check.

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