Shutdown epi2 SNF 2011-10-25 09:40:54: serious problem

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Oct 25 16:51:22 PDT 2011


There was a slight coating on the dome.  We have run 4 Ge etches and it looks better.  I did notice that the system seems to be ramping up to temp slower than we installed the last set of 4 lamps.  We could be getting close to a lamp falure (we can't see the lower lamps)
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Watch your recipes and make sure your temps are at setpoint before critical steps (like Ge deps/anneals)




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