Problem epi2 SNF 2011-10-26 02:12:31: SiH4 flow deviation error

dwnam at snf.stanford.edu dwnam at snf.stanford.edu
Wed Oct 26 02:12:32 PDT 2011


The recipe has SiH4 flow of 38.1sccm and epi2 keeps giving me 13% flow deviation error. I suspect that SiH4 is running low?




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