Comment epi2 SNF 2011-10-25 13:22:07: Ran 1successful etch coat
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Mon Oct 31 07:14:52 PDT 2011
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Comment epi2 SNF 2011-10-25 13:22:07: Ran 1successful etch coat
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Problem epi2 SNF 2011-10-26 02:12:31: SiH4 flow deviation error
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Comment epi2 SNF 2011-10-25 13:22:07: Ran 1successful etch coat
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Problem epi2 SNF 2011-10-26 02:12:31: SiH4 flow deviation error
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