October 2011 Archives by author

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Starting: Tue Oct 4 14:06:05 PDT 2011
Ending: Mon Oct 31 14:04:02 PDT 2011
Messages: 66

Reservations removed Ted Berg
Warning Low arsine Ted Berg
GeH4 is low and will be changed tomorrow Ted Berg
Problem epi2 SNF 2011-10-15 10:55:01: HCl flow deviation error during Ge etch coat dongrip at snf.stanford.edu
Problem epi2 SNF 2011-10-26 02:12:31: SiH4 flow deviation error dwnam at snf.stanford.edu
Problem epi2 SNF 2011-10-14 16:16:00: HCL Flow Deviation edfei at snf.stanford.edu
Shutdown epi2 SNF 2011-10-21 17:34:42: edfei at snf.stanford.edu
Problem epi2 SNF 2011-10-26 18:08:20: Hazy Wafers edfei at snf.stanford.edu
Problem epi2 SNF 2011-10-16 21:02:41: previous user's wafer slid ehe at snf.stanford.edu
Problem epi2 SNF 2011-10-25 09:35:42: chA pressure deviation ehe at snf.stanford.edu
Shutdown epi2 SNF 2011-10-25 09:40:54: serious problem ehe at snf.stanford.edu
Comment epi2 SNF 2011-10-10 16:52:44: sensitivity increased eldwin at snf.stanford.edu
Problem epi2 SNF 2011-10-21 14:58:31: ChA error eldwin at snf.stanford.edu
Problem epi2 SNF 2011-10-28 11:14:28: SYSTEM MONITOR itot at snf.stanford.edu
Problem epi2 SNF 2011-10-16 23:20:39: wafer stuck at transfer chamber junam at snf.stanford.edu
Problem epi2 SNF 2011-10-13 10:09:16: ge etch coat recipe got aborted lennonl at snf.stanford.edu
Problem epi2 SNF 2011-10-19 18:16:06: B cassette, Slot 5 is dirty maurice at snf.stanford.edu
Shutdown epi2 SNF 2011-10-19 06:21:40: Gas tie ins maurice at snf.stanford.edu
Shutdown epi2 SNF 2011-10-20 14:45:40: wafer loading error maurice at snf.stanford.edu
Shutdown epi2 SNF 2011-10-25 09:40:54: serious problem maurice at snf.stanford.edu
Problem epi2 SNF 2011-10-06 10:00:13: DOP1 flow error sclaussen at snf.stanford.edu
Problem epi2 SNF 2011-10-29 11:24:34: Error while loading wafer sclaussen at snf.stanford.edu
Comment epi2 SNF 2011-10-29 16:59:06: Recovered wafer from transfer chamber. sclaussen at snf.stanford.edu
Comment epi2 SNF 2011-10-19 14:21:52: germabe cylinder changed, on leak check seymour at snf.stanford.edu
Problem epi2 SNF 2011-10-19 14:01:10: Changing Germane seymour at snf.stanford.edu
Comment epi2 SNF 2011-10-19 14:21:52: germabe cylinder changed, on leak check seymour at snf.stanford.edu
Comment epi2 SNF 2011-10-18 09:56:57: GeH4 is getting low seymour at snf.stanford.edu
Comment epi2 SNF 2011-10-20 07:16:42: new germane cylinder online seymour at snf.stanford.edu
Shutdown epi2 SNF 2011-10-20 14:45:40: wafer loading error seymour at snf.stanford.edu
Shutdown epi2 SNF 2011-10-10 07:51:54: Facilities work tberg at snf.stanford.edu
Shutdown epi2 SNF 2011-10-10 07:51:54: Facilities work tberg at snf.stanford.edu
Comment epi2 SNF 2011-10-10 14:31:02: Epi is now available tberg at snf.stanford.edu
Comment epi2 SNF 2011-10-12 13:03:13: No Arsine tberg at snf.stanford.edu
Problem epi2 SNF 2011-10-06 10:00:13: DOP1 flow error tberg at snf.stanford.edu
Comment epi2 SNF 2011-10-10 14:31:02: Epi is now available tberg at snf.stanford.edu
Comment epi2 SNF 2011-10-12 13:03:13: No Arsine tberg at snf.stanford.edu
Problem epi2 SNF 2011-09-29 08:52:49: Ch A pressure setpoint deviation error tberg at snf.stanford.edu
Comment epi2 SNF 2011-09-15 11:57:02: flowed GeH4 manually tberg at snf.stanford.edu
Problem epi2 SNF 2011-10-13 10:09:16: ge etch coat recipe got aborted tberg at snf.stanford.edu
Comment epi2 SNF 2011-10-13 10:52:45: Dope1 switched to ASH3 tberg at snf.stanford.edu
Comment epi2 SNF 2011-10-14 07:25:52: Arsine is down for leak check tberg at snf.stanford.edu
Comment epi2 SNF 2011-10-14 07:25:52: Arsine is down for leak check tberg at snf.stanford.edu
Problem epi2 SNF 2011-10-14 16:16:00: HCL Flow Deviation tberg at snf.stanford.edu
Problem epi2 SNF 2011-10-15 10:55:01: HCl flow deviation error during Ge etch coat tberg at snf.stanford.edu
Problem epi2 SNF 2011-10-16 21:02:41: previous user's wafer slid tberg at snf.stanford.edu
Problem epi2 SNF 2011-10-16 23:20:39: wafer stuck at transfer chamber tberg at snf.stanford.edu
Comment epi2 SNF 2011-10-18 09:56:57: GeH4 is getting low tberg at snf.stanford.edu
Shutdown epi2 SNF 2011-10-19 06:21:40: Gas tie ins tberg at snf.stanford.edu
Problem epi2 SNF 2011-10-19 14:01:10: Changing Germane tberg at snf.stanford.edu
Comment epi2 SNF 2011-10-13 10:52:45: Dope1 switched to ASH3 tberg at snf.stanford.edu
Problem epi2 SNF 2011-10-21 14:58:31: ChA error tberg at snf.stanford.edu
Shutdown epi2 SNF 2011-10-21 17:34:42: tberg at snf.stanford.edu
Shutdown epi2 SNF 2011-10-24 08:15:52: Checking out Scrubber issue tberg at snf.stanford.edu
Shutdown epi2 SNF 2011-10-24 08:15:52: Checking out Scrubber issue tberg at snf.stanford.edu
Comment epi2 SNF 2011-10-25 13:22:07: Ran 1successful etch coat tberg at snf.stanford.edu
Problem epi2 SNF 2011-10-28 11:14:28: SYSTEM MONITOR tberg at snf.stanford.edu
Problem epi2 SNF 2011-10-29 11:24:34: Error while loading wafer tberg at snf.stanford.edu
Comment epi2 SNF 2011-10-29 16:59:06: Recovered wafer from transfer chamber. tberg at snf.stanford.edu
Problem epi2 SNF 2011-10-24 17:13:48: dirts left on the backside of the wafers tberg at snf.stanford.edu
Problem epi2 SNF 2011-10-25 09:35:42: chA pressure deviation tberg at snf.stanford.edu
Comment epi2 SNF 2011-10-25 13:22:07: Ran 1successful etch coat tberg at snf.stanford.edu
Comment epi2 SNF 2011-10-24 17:12:15: tberg at snf.stanford.edu
Comment epi2 SNF 2011-10-31 07:54:40: Ran GeEtch coat tberg at snf.stanford.edu
Comment epi2 SNF 2011-10-31 14:04:02: Epi is available tberg at snf.stanford.edu
Comment epi2 SNF 2011-10-24 17:12:15: wangss at snf.stanford.edu
Problem epi2 SNF 2011-10-24 17:13:48: dirts left on the backside of the wafers wangss at snf.stanford.edu

Last message date: Mon Oct 31 14:04:02 PDT 2011
Archived on: Sun Dec 23 08:53:01 PST 2012

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