From dongrip at snf.stanford.edu Sat Sep 10 18:35:24 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Sat, 10 Sep 2011 18:35:24 -0700 Subject: Comment epi2 SNF 2011-09-10 18:35:23: Need mroe log-book sheet Message-ID: Thanks. From ehe at snf.stanford.edu Sun Sep 11 20:28:58 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sun, 11 Sep 2011 20:28:58 -0700 Subject: Shutdown epi2 SNF 2011-09-11 20:28:58: extreme haze Message-ID: From ehe at snf.stanford.edu Sun Sep 11 20:29:57 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sun, 11 Sep 2011 20:29:57 -0700 Subject: Comment epi2 SNF 2011-09-11 20:29:57: problems Message-ID: -load lock pump failure (B) -extremely hazy output (wafers came out white) indicating serious problems -GeH4 seems to have run out From tberg at snf.stanford.edu Mon Sep 12 07:56:39 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 12 Sep 2011 07:56:39 -0700 Subject: Comment epi2 SNF 2011-09-12 07:56:39: GeH4 is indeed empty Message-ID: GeH4 is indeed empty. Cylinder is being filled. Checking on ETA. From tberg at snf.stanford.edu Mon Sep 12 10:58:15 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 12 Sep 2011 10:58:15 -0700 Subject: Shutdown epi2 SNF 2011-09-11 20:28:58: extreme haze Message-ID: Most likely result of no GeH4 From tberg at snf.stanford.edu Mon Sep 12 10:59:06 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 12 Sep 2011 10:59:06 -0700 Subject: Comment epi2 SNF 2011-09-11 20:29:57: problems Message-ID: LL pump started. wafer moved out. Geh4 is indeed Empty. From tberg at snf.stanford.edu Mon Sep 12 11:38:29 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 12 Sep 2011 11:38:29 -0700 Subject: Comment epi2 SNF 2011-09-12 11:38:28: Ran 2 geetchcoats Message-ID: From tberg at snf.stanford.edu Thu Sep 15 09:28:00 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 15 Sep 2011 09:28:00 -0700 Subject: Comment epi2 SNF 2011-09-15 09:27:59: GeH4 is installed and in Leak Check Message-ID: GeH4 is installed and in Leak Check From seymour at snf.stanford.edu Thu Sep 15 10:28:03 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 15 Sep 2011 10:28:03 -0700 Subject: Comment epi2 SNF 2011-09-15 10:28:03: Germane is turned on to the tool Message-ID: leak check passed. From tberg at snf.stanford.edu Thu Sep 15 11:57:02 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 15 Sep 2011 11:57:02 -0700 Subject: Comment epi2 SNF 2011-09-15 11:57:02: flowed GeH4 manually Message-ID: flowed GeH4 manually. ran Geetchcoat From tberg at snf.stanford.edu Thu Sep 15 12:27:59 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 15 Sep 2011 12:27:59 -0700 Subject: Comment epi2 SNF 2011-09-15 09:27:59: GeH4 is installed and in Leak Check Message-ID: Fowed Manually ran GEetchcoat From tberg at snf.stanford.edu Thu Sep 15 12:28:28 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 15 Sep 2011 12:28:28 -0700 Subject: Comment epi2 SNF 2011-09-15 10:28:03: Germane is turned on to the tool Message-ID: Flowed manually ran geetchcoat From tberg at snf.stanford.edu Thu Sep 15 12:28:40 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 15 Sep 2011 12:28:40 -0700 Subject: Comment epi2 SNF 2011-09-12 07:56:39: GeH4 is indeed empty Message-ID: Replaced From tberg at snf.stanford.edu Thu Sep 15 12:29:13 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 15 Sep 2011 12:29:13 -0700 Subject: Comment epi2 SNF 2011-09-12 11:38:28: Ran 2 geetchcoats Message-ID: Noted From tberg at snf.stanford.edu Thu Sep 15 12:29:31 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 15 Sep 2011 12:29:31 -0700 Subject: Comment epi2 SNF 2011-09-10 18:35:23: Need mroe log-book sheet Message-ID: noted From maurice at snf.stanford.edu Thu Sep 15 13:16:08 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 15 Sep 2011 13:16:08 -0700 Subject: Comment epi2 SNF 2011-08-25 19:13:17: processed without problems Message-ID: logged From maurice at snf.stanford.edu Fri Sep 16 09:54:28 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 16 Sep 2011 09:54:28 -0700 Subject: Shutdown epi2 SNF 2011-09-16 09:54:27: replacing HCL Message-ID: From seymour at snf.stanford.edu Fri Sep 16 14:10:36 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 16 Sep 2011 14:10:36 -0700 Subject: Shutdown epi2 SNF 2011-09-16 09:54:27: replacing HCL Message-ID: HCL replaced and leak check passed. HCL turned on From sclaussen at snf.stanford.edu Mon Sep 19 08:14:37 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Mon, 19 Sep 2011 08:14:37 -0700 Subject: Problem epi2 SNF 2011-09-19 08:14:37: DOP1 flow error: deviated by more than 100% Message-ID: In recipe, DOP1 is set to 100.0 with a ratio of 75%. From tberg at stanford.edu Mon Sep 19 13:41:14 2011 From: tberg at stanford.edu (Ted Berg) Date: Mon, 19 Sep 2011 13:41:14 -0700 Subject: Reservations on Epi Message-ID: <4E77A8EA.9020203@stanford.edu> Hello All, You may have noticed large blocks of reservations, these are to accommodate AMAT working on installing the second chamber. All of their work for now will be non intrusive. You will see reservations change to accommodate their busy schedule. I am removing the reservations for this evening until tomorrow afternoon so this time is up for grabs. We appreciate your understanding as we move ahead on this install. Ted From edfei at snf.stanford.edu Tue Sep 20 11:32:52 2011 From: edfei at snf.stanford.edu (edfei at snf.stanford.edu) Date: Tue, 20 Sep 2011 11:32:52 -0700 Subject: Shutdown epi2 SNF 2011-09-20 11:32:51: ChA Upper Outer Bulb Failure Message-ID: From tberg at snf.stanford.edu Tue Sep 20 13:06:08 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 20 Sep 2011 13:06:08 -0700 Subject: Shutdown epi2 SNF 2011-09-20 11:32:51: ChA Upper Outer Bulb Failure Message-ID: Changed bad upper lamps . Ran etchcoat fine From tberg at stanford.edu Wed Sep 21 05:57:32 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 21 Sep 2011 05:57:32 -0700 Subject: reservations cancelled Message-ID: <4E79DF3C.5000107@stanford.edu> Hello all, Ihave cancelled the early morning reservations. so epi is available until 10:00am From tberg at stanford.edu Wed Sep 21 11:38:38 2011 From: tberg at stanford.edu (Ted Berg) Date: Wed, 21 Sep 2011 11:38:38 -0700 Subject: Reservations released Message-ID: <4E7A2F2E.5070500@stanford.edu> Hello All, I am releasing reservation. Looks like AMAT is a no show. Ted From dongrip at snf.stanford.edu Sun Sep 25 11:42:56 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Sun, 25 Sep 2011 11:42:56 -0700 Subject: Problem epi2 SNF 2011-09-25 11:42:56: Light pen doesn't work. Message-ID: Light pen doesn't work, but another one behind the machine is still functional. Please take a look. From dongrip at snf.stanford.edu Sun Sep 25 11:44:20 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Sun, 25 Sep 2011 11:44:20 -0700 Subject: Problem epi2 SNF 2011-09-25 11:44:19: HCL flow deviation during the Ge etch coat. Message-ID: When running Ge etch coat, HCL flow deviation (6~8%) error occurred. Specifically, when reaching to the 980 sccm target value of HCL during the cleaning, it happens due to slowly reaching the target value. This sometimes happens, but sometimes not. From dongrip at snf.stanford.edu Sun Sep 25 18:04:19 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Sun, 25 Sep 2011 18:04:19 -0700 Subject: Problem epi2 SNF 2011-09-25 18:04:18: HCL flow deviation is getting higher. Message-ID: now it's ~10%. From sclaussen at snf.stanford.edu Mon Sep 26 00:55:09 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Mon, 26 Sep 2011 00:55:09 -0700 Subject: Problem epi2 SNF 2011-09-26 00:55:08: Error during wafer mapping Message-ID: Got an error "CROSS SLOT - ERROR 4" during wafer mapping. Opening the loadlock, removing the cassette and putting it back seemed to work, but previous user continually had the same error as well (according to the Fault Log). Also, we need more sheets of paper to log our runs. From jasonlin at snf.stanford.edu Mon Sep 26 17:18:16 2011 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Mon, 26 Sep 2011 17:18:16 -0700 Subject: Shutdown epi2 SNF 2011-09-26 17:18:16: HCl deviation error Message-ID: HCl deviation error by 14% during Ge etch coat. Ch A in Isolated state, cannot go back to Inert Idle. From tberg at snf.stanford.edu Tue Sep 27 06:18:00 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 27 Sep 2011 06:18:00 -0700 Subject: Problem epi2 SNF 2011-09-25 11:42:56: Light pen doesn't work. Message-ID: operator issues need to change switch position From tberg at snf.stanford.edu Tue Sep 27 07:26:36 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 27 Sep 2011 07:26:36 -0700 Subject: Shutdown epi2 SNF 2011-09-26 17:18:16: HCl deviation error Message-ID: Checked HCL in gas bunker looks fine. Reset system ran ge etch coat no problem, Wiil leave open for observation. From ehe at snf.stanford.edu Tue Sep 27 12:28:01 2011 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Tue, 27 Sep 2011 12:28:01 -0700 Subject: Problem epi2 SNF 2011-09-27 12:28:00: can't use because not enough arsine!! Message-ID: Deleting my reservation. From tberg at snf.stanford.edu Wed Sep 28 06:05:20 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 28 Sep 2011 06:05:20 -0700 Subject: Problem epi2 SNF 2011-09-27 12:28:00: can't use because not enough arsine!! Message-ID: there is arsine From eldwin at snf.stanford.edu Thu Sep 29 08:52:50 2011 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Thu, 29 Sep 2011 08:52:50 -0700 Subject: Problem epi2 SNF 2011-09-29 08:52:49: Ch A pressure setpoint deviation error Message-ID: Error encountered during cleaning recipe etchcoat and cleaning process was aborted. Subsequent user also had pressure setpoint warnings. From daniela at snf.stanford.edu Thu Sep 29 22:45:28 2011 From: daniela at snf.stanford.edu (daniela at snf.stanford.edu) Date: Thu, 29 Sep 2011 22:45:28 -0700 Subject: Problem epi2 SNF 2011-09-29 22:45:28: error messages Message-ID: The wafers seemed to run through fine, however as I disabled the machine I got a warning about chamber A detecting the system cabinet door being opened. This was a red highlighted warning Additionally, there were a few yellow highlighted warnings about the preesure in chamber A. From maurice at snf.stanford.edu Fri Sep 30 08:20:50 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 30 Sep 2011 08:20:50 -0700 Subject: Problem epi2 SNF 2011-09-29 22:45:28: error messages Message-ID: The message is normal. Coral is interlocked into the cabinet door. When the tool is not enabled, it thinks a cabinet is open and will not operate. -m From maurice at snf.stanford.edu Fri Sep 30 08:21:12 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 30 Sep 2011 08:21:12 -0700 Subject: Problem epi2 SNF 2011-09-26 00:55:08: Error during wafer mapping Message-ID: logged From maurice at snf.stanford.edu Fri Sep 30 08:21:47 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 30 Sep 2011 08:21:47 -0700 Subject: Problem epi2 SNF 2011-09-25 18:04:18: HCL flow deviation is getting higher. Message-ID: pressure in recipe reduced from 980 to 900sccm From maurice at snf.stanford.edu Fri Sep 30 08:21:58 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 30 Sep 2011 08:21:58 -0700 Subject: Problem epi2 SNF 2011-09-25 11:44:19: HCL flow deviation during the Ge etch coat. Message-ID: pressure in recipe reduced from 980 to 900sccm From maurice at snf.stanford.edu Fri Sep 30 08:22:36 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 30 Sep 2011 08:22:36 -0700 Subject: Problem epi2 SNF 2011-09-19 08:14:37: DOP1 flow error: deviated by more than 100% Message-ID: increased delivery pressure From maurice at snf.stanford.edu Fri Sep 30 08:23:16 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 30 Sep 2011 08:23:16 -0700 Subject: Comment epi2 SNF 2011-06-09 14:40:52: 2 min to Ge etch Message-ID: looged