Problem epi2 SNF 2011-09-25 18:04:18: HCL flow deviation is getting higher.
dongrip at snf.stanford.edu
dongrip at snf.stanford.edu
Sun Sep 25 18:04:19 PDT 2011
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Problem epi2 SNF 2011-09-25 11:44:19: HCL flow deviation during the Ge etch coat.
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Problem epi2 SNF 2011-09-25 18:04:18: HCL flow deviation is getting higher.
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now it's ~10%.
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Problem epi2 SNF 2011-09-25 11:44:19: HCL flow deviation during the Ge etch coat.
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Problem epi2 SNF 2011-09-25 18:04:18: HCL flow deviation is getting higher.
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