Problem epi2 SNF 2011-09-26 00:55:08: Error during wafer mapping

sclaussen at snf.stanford.edu sclaussen at snf.stanford.edu
Mon Sep 26 00:55:09 PDT 2011


Got an error "CROSS SLOT - ERROR 4" during wafer mapping. Opening the loadlock, removing the cassette and putting it back seemed to work, but previous user continually had the same error as well (according to the Fault Log). Also, we need more sheets of paper to log our runs.




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