Shutdown epi2 SNF 2011-09-26 17:18:16: HCl deviation error

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Mon Sep 26 17:18:16 PDT 2011


HCl deviation error by 14% during Ge etch coat.  Ch A in Isolated state, cannot go back to Inert Idle.




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