Problem epi2 SNF 2011-09-25 11:42:56: Light pen doesn't work.
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Tue Sep 27 06:18:00 PDT 2011
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Problem epi2 SNF 2011-09-25 11:42:56: Light pen doesn't work.
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Problem epi2 SNF 2011-09-25 11:44:19: HCL flow deviation during the Ge etch coat.
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operator issues need to change switch position
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Problem epi2 SNF 2011-09-25 11:42:56: Light pen doesn't work.
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Problem epi2 SNF 2011-09-25 11:44:19: HCL flow deviation during the Ge etch coat.
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