Problem epi2 SNF 2011-09-29 22:45:28: error messages

daniela at snf.stanford.edu daniela at snf.stanford.edu
Thu Sep 29 22:45:28 PDT 2011


The wafers seemed to run through fine, however as I disabled the machine I got a warning about chamber A detecting the system cabinet door being opened. This was a red highlighted warning Additionally, there were a few yellow highlighted warnings about the preesure in chamber A. 




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