From tberg at snf.stanford.edu Fri Apr 6 07:29:54 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 6 Apr 2012 07:29:54 -0700 Subject: Shutdown epi2 SNF 2012-02-27 08:01:40: Chamber A leak Message-ID: isolation and bypass valves replaced leak is good From maurice at snf.stanford.edu Mon Apr 9 14:49:34 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 9 Apr 2012 14:49:34 -0700 Subject: Shutdown epi2 SNF 2011-12-12 07:27:04: Renovation Message-ID: Silicon tests good. Ran Kentest2 for 110 sec. 2.2um No haze From maurice at snf.stanford.edu Mon Apr 9 14:53:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 9 Apr 2012 14:53:21 -0700 Subject: Problem epi2 SNF 2012-04-09 14:53:21: dopant gases off Message-ID: Diborane, Phos, Arsine are off until tomorrow. HCl, DCS, siline and Ge are on now. From tberg at snf.stanford.edu Tue Apr 10 07:15:12 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 10 Apr 2012 07:15:12 -0700 Subject: Problem epi2 SNF 2012-04-09 14:53:21: dopant gases off Message-ID: All dopant lines pumped down and gases turned back on From jasonlin at snf.stanford.edu Tue Apr 10 15:57:28 2012 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Tue, 10 Apr 2012 15:57:28 -0700 Subject: Problem epi2 SNF 2012-04-10 15:57:27: HCl, Silane Deviation Error Message-ID: From tberg at snf.stanford.edu Wed Apr 11 06:15:18 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 11 Apr 2012 06:15:18 -0700 Subject: Problem epi2 SNF 2012-04-10 15:57:27: HCl, Silane Deviation Error Message-ID: HCL had tripped off,it is back on now From maurice at snf.stanford.edu Wed Apr 11 13:46:38 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 11 Apr 2012 13:46:38 -0700 Subject: Comment epi2 SNF 2012-04-11 13:46:37: silane pressure? Message-ID: EdFai repotred that Silane flowed fine at 40sccm but faulted at 100sccm. I verified that it doesn't hold 100sccm for more than a few seconds. From edfei at snf.stanford.edu Wed Apr 11 17:31:42 2012 From: edfei at snf.stanford.edu (edfei at snf.stanford.edu) Date: Wed, 11 Apr 2012 17:31:42 -0700 Subject: Problem epi2 SNF 2012-04-11 17:31:42: out of silane gas Message-ID: Silane failed to reach 30sccm flow rates. From jasonlin at snf.stanford.edu Wed Apr 11 23:15:44 2012 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Wed, 11 Apr 2012 23:15:44 -0700 Subject: Problem epi2 SNF 2012-04-11 23:15:44: HCl Deviation again Message-ID: HCl deviation in same Ge Etch Coat step as yesterday (step #8). Setpoint is 800sccm, got very little (fluctuating between 0 to 20 sccm, probably just residual gas in the line). Did the HCl trip again? What causes it to trip? How do we avoid this to maintain tool up time? From tberg at snf.stanford.edu Thu Apr 12 06:53:23 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 12 Apr 2012 06:53:23 -0700 Subject: Problem epi2 SNF 2012-04-11 23:15:44: HCl Deviation again Message-ID: reset HCL panel and adjusted trip levels From alsune at snf.stanford.edu Thu Apr 12 14:00:32 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Thu, 12 Apr 2012 14:00:32 -0700 Subject: Problem epi2 SNF 2012-04-12 14:00:32: HCl deviation problem.... Message-ID: HCl flow deviation by 90% From tberg at snf.stanford.edu Thu Apr 12 14:22:50 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 12 Apr 2012 14:22:50 -0700 Subject: Problem epi2 SNF 2012-04-12 14:00:32: HCl deviation problem.... Message-ID: reset HCL back on line From alsune at snf.stanford.edu Thu Apr 12 20:57:07 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Thu, 12 Apr 2012 20:57:07 -0700 Subject: Problem epi2 SNF 2012-04-12 20:57:06: Repeating HCl flow deviation Message-ID: Again the machine stopped after giving HCl deviation by 100%. This problem seems repeating again and again. Is there a problem with the HCl gas flow mfc? From junam at snf.stanford.edu Thu Apr 12 22:21:27 2012 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Thu, 12 Apr 2012 22:21:27 -0700 Subject: Problem epi2 SNF 2012-04-12 22:21:26: HCl flow deviation Message-ID: GE ETCH COAT:: was used for chamber cleaning. During the recipe run, on step 8: Bake (Lower PID 1100 oC and HCL setpoint 800), HCL flow could not reach the set point (800), and flow read deviated under 40 sccm. Process was aborted due to the HCl flow deviation. From maurice at snf.stanford.edu Fri Apr 13 09:49:28 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 13 Apr 2012 09:49:28 -0700 Subject: Shutdown epi2 SNF 2012-04-13 09:49:27: HCl gas cabinet issue Message-ID: Cabinet not flowing HCL or purging Ray is calling vendor (AirProducts) From seymour at snf.stanford.edu Mon Apr 16 07:10:53 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 16 Apr 2012 07:10:53 -0700 Subject: Problem epi2 SNF 2012-04-11 17:31:42: out of silane gas Message-ID: silane cylinder has been changed From tberg at snf.stanford.edu Mon Apr 16 09:08:51 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 16 Apr 2012 09:08:51 -0700 Subject: Comment epi2 SNF 2012-04-11 13:46:37: silane pressure? Message-ID: Replaced silane cylinder From tberg at snf.stanford.edu Mon Apr 16 09:09:31 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 16 Apr 2012 09:09:31 -0700 Subject: Problem epi2 SNF 2012-04-12 20:57:06: Repeating HCl flow deviation Message-ID: Reset HCl cylinder-observing From tberg at snf.stanford.edu Mon Apr 16 09:09:39 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 16 Apr 2012 09:09:39 -0700 Subject: Shutdown epi2 SNF 2012-04-13 09:49:27: HCl gas cabinet issue Message-ID: Reset HCl cylinder-observing From tberg at snf.stanford.edu Mon Apr 16 09:09:53 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 16 Apr 2012 09:09:53 -0700 Subject: Problem epi2 SNF 2012-04-12 22:21:26: HCl flow deviation Message-ID: Reset HCl cylinder-observing From maurice at snf.stanford.edu Mon Apr 16 14:26:52 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 16 Apr 2012 14:26:52 -0700 Subject: Shutdown epi2 SNF 2012-04-16 14:26:51: HCL failure Message-ID: HCl flow deviation Gas kicked off again at the cabinet From maurice at snf.stanford.edu Wed Apr 18 15:32:45 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 18 Apr 2012 15:32:45 -0700 Subject: Shutdown epi2 SNF 2012-04-16 14:26:51: HCL failure Message-ID: Setpoint for hi side pressure transducer adjusted HCl bottle changed From maurice at snf.stanford.edu Wed Apr 18 15:33:51 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 18 Apr 2012 15:33:51 -0700 Subject: Problem epi2 SNF 2012-04-18 15:33:50: Silane MFC issue Message-ID: Silane MFC is not working properly. New MFC ordered. From maurice at snf.stanford.edu Wed Apr 18 15:35:55 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 18 Apr 2012 15:35:55 -0700 Subject: Comment epi2 SNF 2012-04-18 15:35:55: Ge etch program modified Message-ID: Step 7 time reduced from 120 sec to 100sec Step 7 time reduced from 120 sec to 100sec Step 8 temp reduced from 1100c to 950c Program is now running without waferflow/contactor error From dongrip at snf.stanford.edu Wed Apr 18 20:45:32 2012 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Wed, 18 Apr 2012 20:45:32 -0700 Subject: Shutdown epi2 SNF 2012-04-18 20:45:31: Water Flow & Contactor error Message-ID: I did Ge etch coat, and due to both errors, the Ge etch coat itself can't be finished. From maurice at snf.stanford.edu Thu Apr 19 11:14:59 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 19 Apr 2012 11:14:59 -0700 Subject: Shutdown epi2 SNF 2012-04-18 20:45:31: Water Flow & Contactor error Message-ID: Looks like someone changed the temp in step 8 of the Ge wtch program. Lowered temp and recipe has when a couple of times with no problem. We will continue to monitor this problem. From dongrip at snf.stanford.edu Fri Apr 20 00:03:33 2012 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Fri, 20 Apr 2012 00:03:33 -0700 Subject: Shutdown epi2 SNF 2012-04-20 00:03:32: Ch A lift cannot reach process position Message-ID: error: Ch A lift cannot reach process position. Ch A is currently isolated, and a wafer is still inside Ch A. FYI, tonight I encountered this error (lift problem) twice. Caesar resolved the previous same issue for me. From tberg at snf.stanford.edu Fri Apr 20 07:56:56 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 20 Apr 2012 07:56:56 -0700 Subject: Shutdown epi2 SNF 2012-04-20 00:03:32: Ch A lift cannot reach process position Message-ID: Reset lifters and moved wafer to LLA. Cycled lifters no problems From dongrip at snf.stanford.edu Fri Apr 20 15:51:43 2012 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Fri, 20 Apr 2012 15:51:43 -0700 Subject: Comment epi2 SNF 2012-04-20 15:51:43: LLB slot 15~20 Message-ID: I recommend not to use slot 15~20 of LLB. I encountered several problems about wafer slide detection problem when using those slots. From cachang at snf.stanford.edu Sun Apr 22 11:44:48 2012 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Sun, 22 Apr 2012 11:44:48 -0700 Subject: Problem epi2 SNF 2012-04-22 11:44:47: Chamber A heater contractor off Message-ID: The machine showed this problem when I ran my process at 1100C about 10mins. Then the machine showed low water flow and automatically terminated the process. From cachang at snf.stanford.edu Sun Apr 22 12:04:16 2012 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Sun, 22 Apr 2012 12:04:16 -0700 Subject: Comment epi2 SNF 2012-04-22 12:04:16: heater contractor off Message-ID: I reset chamber A and ran the process at 1100C again. The same problem showed after running the process for 10mins: heater contractor off and low water flow. I then moved my wafer out. From dongrip at snf.stanford.edu Sun Apr 22 19:47:39 2012 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Sun, 22 Apr 2012 19:47:39 -0700 Subject: Problem epi2 SNF 2012-04-22 19:47:38: Mixed dopant gas flow error Message-ID: I used 1% diborane as a dopant gas. If I flow D-DOP2, there's no problem at all. However, if I flow DOP2 with MR 20%, I encountered the error as below. 1) I flew DOP2 (MR 20%) at 100 sccm using DOP FLOW TEST recipe. 2) at the beginning, for 20 sec, no error message (gas flow ok) 3) 20 sec after it, Global DOP2 flow deviated by 94% error message popped up, and the chamber was isolated. I observed this repeatably. Please resolve this issue.... From dongrip at snf.stanford.edu Mon Apr 23 23:54:23 2012 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Mon, 23 Apr 2012 23:54:23 -0700 Subject: Shutdown epi2 SNF 2012-04-23 23:54:22: Ch A lift cannot reach process position Message-ID: pneumatic lift error. cannot proceed any process including cleaning. From tberg at snf.stanford.edu Tue Apr 24 08:31:32 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 24 Apr 2012 08:31:32 -0700 Subject: Shutdown epi2 SNF 2012-04-23 23:54:22: Ch A lift cannot reach process position Message-ID: Cycled lifter no problem started etch-coat. It ran with no problems. From maurice at snf.stanford.edu Tue Apr 24 11:49:22 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 24 Apr 2012 11:49:22 -0700 Subject: Problem epi2 SNF 2012-04-24 11:49:22: Mixed dopant MFC not flowing Message-ID: Mixed dopant MFC not flowing. Dop1 and Dop2 share the same MFC and neither will flow. Direct dopant MFC's are flowing...so it is not a gas problem. From dongrip at snf.stanford.edu Wed Apr 25 06:17:26 2012 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Wed, 25 Apr 2012 06:17:26 -0700 Subject: Shutdown epi2 SNF 2012-04-25 06:17:26: ch a lift cannot reach process position Message-ID: this problem is repeated within 4-5 runs after resetting... From tberg at snf.stanford.edu Wed Apr 25 13:14:00 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 25 Apr 2012 13:14:00 -0700 Subject: Shutdown epi2 SNF 2012-04-25 06:17:26: ch a lift cannot reach process position Message-ID: adjusted lift checked numerous times worked From tberg at snf.stanford.edu Wed Apr 25 13:15:39 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 25 Apr 2012 13:15:39 -0700 Subject: Problem epi2 SNF 2012-04-24 11:49:22: Mixed dopant MFC not flowing Message-ID: turned both valves to mixed dopants on From tberg at snf.stanford.edu Wed Apr 25 13:27:43 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 25 Apr 2012 13:27:43 -0700 Subject: Problem epi2 SNF 2012-04-22 19:47:38: Mixed dopant gas flow error Message-ID: dopant valves enabled From jasonlin at snf.stanford.edu Sun Apr 29 14:48:37 2012 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sun, 29 Apr 2012 14:48:37 -0700 Subject: Problem epi2 SNF 2012-04-29 14:48:37: HCl Deviation Error Message-ID: Unable to finish Ge Etch Coat recipe From tberg at snf.stanford.edu Mon Apr 30 06:26:56 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 30 Apr 2012 06:26:56 -0700 Subject: Shutdown epi2 SNF 2012-04-30 06:26:56: HCl is being changed Message-ID: From tberg at snf.stanford.edu Mon Apr 30 09:19:56 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 30 Apr 2012 09:19:56 -0700 Subject: Problem epi2 SNF 2012-04-29 14:48:37: HCl Deviation Error Message-ID: Replaced HCL cylinder did etch coat From tberg at snf.stanford.edu Mon Apr 30 09:20:10 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 30 Apr 2012 09:20:10 -0700 Subject: Shutdown epi2 SNF 2012-04-30 06:26:56: HCl is being changed Message-ID: Replaced HCL cylinder did etch coat From mtang at snf.stanford.edu Mon Apr 30 20:53:08 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 30 Apr 2012 20:53:08 -0700 Subject: Problem epi2 SNF 2012-04-30 20:53:07: Do not run arsine Message-ID: Sensor in the basement is acting up.