Shutdown epi2 SNF 2011-12-12 07:27:04: Renovation
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Mon Apr 9 14:49:34 PDT 2012
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Problem epi2 SNF 2012-04-09 14:53:21: dopant gases off
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Silicon tests good. Ran Kentest2 for 110 sec. 2.2um No haze
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Shutdown epi2 SNF 2012-02-27 08:01:40: Chamber A leak
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Problem epi2 SNF 2012-04-09 14:53:21: dopant gases off
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