Problem epi2 SNF 2012-04-09 14:53:21: dopant gases off
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Tue Apr 10 07:15:12 PDT 2012
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Problem epi2 SNF 2012-04-09 14:53:21: dopant gases off
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Problem epi2 SNF 2012-04-10 15:57:27: HCl, Silane Deviation Error
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All dopant lines pumped down and gases turned back on
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Problem epi2 SNF 2012-04-09 14:53:21: dopant gases off
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Problem epi2 SNF 2012-04-10 15:57:27: HCl, Silane Deviation Error
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