Problem epi2 SNF 2012-04-10 15:57:27: HCl, Silane Deviation Error
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Wed Apr 11 06:15:18 PDT 2012
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Problem epi2 SNF 2012-04-10 15:57:27: HCl, Silane Deviation Error
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Comment epi2 SNF 2012-04-11 13:46:37: silane pressure?
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HCL had tripped off,it is back on now
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Problem epi2 SNF 2012-04-10 15:57:27: HCl, Silane Deviation Error
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Comment epi2 SNF 2012-04-11 13:46:37: silane pressure?
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