Comment epi2 SNF 2012-04-11 13:46:37: silane pressure?

maurice at snf.stanford.edu maurice at snf.stanford.edu
Wed Apr 11 13:46:38 PDT 2012


EdFai repotred that Silane flowed fine at 40sccm but faulted at 100sccm.
I verified that it doesn't hold 100sccm for more than a few seconds.  




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