Problem epi2 SNF 2012-04-11 17:31:42: out of silane gas
edfei at snf.stanford.edu
edfei at snf.stanford.edu
Wed Apr 11 17:31:42 PDT 2012
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Comment epi2 SNF 2012-04-11 13:46:37: silane pressure?
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Problem epi2 SNF 2012-04-11 17:31:42: out of silane gas
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Silane failed to reach 30sccm flow rates.
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Comment epi2 SNF 2012-04-11 13:46:37: silane pressure?
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Problem epi2 SNF 2012-04-11 17:31:42: out of silane gas
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