Problem epi2 SNF 2012-04-11 23:15:44: HCl Deviation again

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Wed Apr 11 23:15:44 PDT 2012


HCl deviation in same Ge Etch Coat step as yesterday (step #8).  Setpoint is 800sccm, got very little (fluctuating between 0 to 20 sccm, probably just residual gas in the line).
Did the HCl trip again?  What causes it to trip?  How do we avoid this to maintain tool up time?




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