Shutdown epi2 SNF 2012-04-20 00:03:32: Ch A lift cannot reach process position

dongrip at snf.stanford.edu dongrip at snf.stanford.edu
Fri Apr 20 00:03:33 PDT 2012


error: Ch A lift cannot reach process position.
Ch A is currently isolated, and a wafer is still inside Ch A.
FYI, tonight I encountered this error (lift problem) twice. Caesar resolved the previous same issue for me. 




More information about the epi2-pcs mailing list