Shutdown epi2 SNF 2012-04-20 00:03:32: Ch A lift cannot reach process position

dongrip at snf.stanford.edu dongrip at snf.stanford.edu
Fri Apr 20 00:03:33 PDT 2012

Previous message: Shutdown epi2 SNF 2012-04-18 20:45:31: Water Flow & Contactor error
Next message: Shutdown epi2 SNF 2012-04-20 00:03:32: Ch A lift cannot reach process position
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

error: Ch A lift cannot reach process position.
Ch A is currently isolated, and a wafer is still inside Ch A.
FYI, tonight I encountered this error (lift problem) twice. Caesar resolved the previous same issue for me.

Previous message: Shutdown epi2 SNF 2012-04-18 20:45:31: Water Flow & Contactor error
Next message: Shutdown epi2 SNF 2012-04-20 00:03:32: Ch A lift cannot reach process position
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the epi2-pcs mailing list