Comment epi2 SNF 2012-04-20 15:51:43: LLB slot 15~20

dongrip at snf.stanford.edu dongrip at snf.stanford.edu
Fri Apr 20 15:51:43 PDT 2012


I recommend not to use slot 15~20 of LLB. I encountered several problems about wafer slide detection problem when using those slots. 




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