Problem epi2 SNF 2012-04-22 11:44:47: Chamber A heater contractor off

cachang at snf.stanford.edu cachang at snf.stanford.edu
Sun Apr 22 11:44:48 PDT 2012


The machine showed this problem when I ran my process at 1100C about 10mins. Then the machine showed low water flow and automatically terminated the process.




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