Comment epi2 SNF 2012-04-22 12:04:16: heater contractor off

cachang at snf.stanford.edu cachang at snf.stanford.edu
Sun Apr 22 12:04:16 PDT 2012


I reset chamber A and ran the process at 1100C again. The same problem showed after running the process for 10mins: heater contractor off and low water flow. I then moved my wafer out.




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