Problem epi2 SNF 2012-04-24 11:49:22: Mixed dopant MFC not flowing

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Apr 24 11:49:22 PDT 2012


Mixed dopant MFC not flowing.
Dop1 and Dop2 share the same MFC and neither will flow.
Direct dopant MFC's are flowing...so it is not a gas problem.




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