Problem epi2 SNF 2012-04-24 11:49:22: Mixed dopant MFC not flowing
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Wed Apr 25 13:15:39 PDT 2012
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Problem epi2 SNF 2012-04-24 11:49:22: Mixed dopant MFC not flowing
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Shutdown epi2 SNF 2012-04-25 06:17:26: ch a lift cannot reach process position
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turned both valves to mixed dopants on
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Problem epi2 SNF 2012-04-24 11:49:22: Mixed dopant MFC not flowing
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Shutdown epi2 SNF 2012-04-25 06:17:26: ch a lift cannot reach process position
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