Shutdown epi2 SNF 2012-04-30 06:26:56: HCl is being changed
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Mon Apr 30 09:20:10 PDT 2012
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Shutdown epi2 SNF 2012-04-30 06:26:56: HCl is being changed
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Problem epi2 SNF 2012-04-30 20:53:07: Do not run arsine
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Replaced HCL cylinder did etch coat
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Shutdown epi2 SNF 2012-04-30 06:26:56: HCl is being changed
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Problem epi2 SNF 2012-04-30 20:53:07: Do not run arsine
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