April 2012 Archives by thread

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Starting: Fri Apr 6 07:29:54 PDT 2012
Ending: Mon Apr 30 20:53:08 PDT 2012
Messages: 44

• Shutdown epi2 SNF 2012-02-27 08:01:40: Chamber A leak   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2011-12-12 07:27:04: Renovation   maurice at snf.stanford.edu
• Problem epi2 SNF 2012-04-09 14:53:21: dopant gases off   maurice at snf.stanford.edu
  • Problem epi2 SNF 2012-04-09 14:53:21: dopant gases off   tberg at snf.stanford.edu
• Problem epi2 SNF 2012-04-10 15:57:27: HCl, Silane Deviation Error   jasonlin at snf.stanford.edu
  • Problem epi2 SNF 2012-04-10 15:57:27: HCl, Silane Deviation Error   tberg at snf.stanford.edu
• Comment epi2 SNF 2012-04-11 13:46:37: silane pressure?   maurice at snf.stanford.edu
  • Comment epi2 SNF 2012-04-11 13:46:37: silane pressure?   tberg at snf.stanford.edu
• Problem epi2 SNF 2012-04-11 17:31:42: out of silane gas   edfei at snf.stanford.edu
  • Problem epi2 SNF 2012-04-11 17:31:42: out of silane gas   seymour at snf.stanford.edu
• Problem epi2 SNF 2012-04-11 23:15:44: HCl Deviation again   jasonlin at snf.stanford.edu
  • Problem epi2 SNF 2012-04-11 23:15:44: HCl Deviation again   tberg at snf.stanford.edu
• Problem epi2 SNF 2012-04-12 14:00:32: HCl deviation problem....   alsune at snf.stanford.edu
  • Problem epi2 SNF 2012-04-12 14:00:32: HCl deviation problem....   tberg at snf.stanford.edu
• Problem epi2 SNF 2012-04-12 20:57:06: Repeating HCl flow deviation   alsune at snf.stanford.edu
  • Problem epi2 SNF 2012-04-12 20:57:06: Repeating HCl flow deviation   tberg at snf.stanford.edu
• Problem epi2 SNF 2012-04-12 22:21:26: HCl flow deviation   junam at snf.stanford.edu
  • Problem epi2 SNF 2012-04-12 22:21:26: HCl flow deviation   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2012-04-13 09:49:27: HCl gas cabinet issue   maurice at snf.stanford.edu
  • Shutdown epi2 SNF 2012-04-13 09:49:27: HCl gas cabinet issue   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2012-04-16 14:26:51: HCL failure   maurice at snf.stanford.edu
  • Shutdown epi2 SNF 2012-04-16 14:26:51: HCL failure   maurice at snf.stanford.edu
• Problem epi2 SNF 2012-04-18 15:33:50: Silane MFC issue   maurice at snf.stanford.edu
• Comment epi2 SNF 2012-04-18 15:35:55: Ge etch program modified   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2012-04-18 20:45:31: Water Flow & Contactor error   dongrip at snf.stanford.edu
  • Shutdown epi2 SNF 2012-04-18 20:45:31: Water Flow & Contactor error   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2012-04-20 00:03:32: Ch A lift cannot reach process position   dongrip at snf.stanford.edu
  • Shutdown epi2 SNF 2012-04-20 00:03:32: Ch A lift cannot reach process position   tberg at snf.stanford.edu
• Comment epi2 SNF 2012-04-20 15:51:43: LLB slot 15~20   dongrip at snf.stanford.edu
• Problem epi2 SNF 2012-04-22 11:44:47: Chamber A heater contractor off   cachang at snf.stanford.edu
• Comment epi2 SNF 2012-04-22 12:04:16: heater contractor off   cachang at snf.stanford.edu
• Problem epi2 SNF 2012-04-22 19:47:38: Mixed dopant gas flow error   dongrip at snf.stanford.edu
  • Problem epi2 SNF 2012-04-22 19:47:38: Mixed dopant gas flow error   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2012-04-23 23:54:22: Ch A lift cannot reach process position   dongrip at snf.stanford.edu
  • Shutdown epi2 SNF 2012-04-23 23:54:22: Ch A lift cannot reach process position   tberg at snf.stanford.edu
• Problem epi2 SNF 2012-04-24 11:49:22: Mixed dopant MFC not flowing   maurice at snf.stanford.edu
  • Problem epi2 SNF 2012-04-24 11:49:22: Mixed dopant MFC not flowing   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2012-04-25 06:17:26: ch a lift cannot reach process position   dongrip at snf.stanford.edu
  • Shutdown epi2 SNF 2012-04-25 06:17:26: ch a lift cannot reach process position   tberg at snf.stanford.edu
• Problem epi2 SNF 2012-04-29 14:48:37: HCl Deviation Error   jasonlin at snf.stanford.edu
  • Problem epi2 SNF 2012-04-29 14:48:37: HCl Deviation Error   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2012-04-30 06:26:56: HCl is being changed   tberg at snf.stanford.edu
  • Shutdown epi2 SNF 2012-04-30 06:26:56: HCl is being changed   tberg at snf.stanford.edu
• Problem epi2 SNF 2012-04-30 20:53:07: Do not run arsine   mtang at snf.stanford.edu

Last message date: Mon Apr 30 20:53:08 PDT 2012
Archived on: Sun Dec 23 08:53:02 PST 2012

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