From sclaussen at snf.stanford.edu Wed Aug 1 10:14:26 2012 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Wed, 1 Aug 2012 10:14:26 -0700 Subject: Problem epi2 SNF 2012-08-01 10:14:26: In cleaning step: pressure setpoint deviation fault Message-ID: We had this problem during our initial cleanings of the chamber before running the wafers, but it was just a Warning. It faulted out after our first wafer. I brought the chamber out of isolation, and am trying it again. From raisul at snf.stanford.edu Wed Aug 1 23:44:14 2012 From: raisul at snf.stanford.edu (raisul at snf.stanford.edu) Date: Wed, 1 Aug 2012 23:44:14 -0700 Subject: Problem epi2 SNF 2012-08-01 23:44:14: Wafer missing Message-ID: The previous user asked me to stop and claim the wafers before I use the chamber. When I came in, her run was not done yet, so I aborted the run and tried to move the wafer from transfer chamber to chmber F to cool it down. System gave an error: Chamber F is ignoring the cmmand. Afther this, I tried to move the wafer from transfer chamber to LLA, and system said there is no wafer on the blade. I claimed the wafers which were already in LLA, but one wafer was still missing. Probably the wafer is still in the tansfer chamber. From raisul at snf.stanford.edu Wed Aug 1 23:45:15 2012 From: raisul at snf.stanford.edu (raisul at snf.stanford.edu) Date: Wed, 1 Aug 2012 23:45:15 -0700 Subject: Shutdown epi2 SNF 2012-08-01 23:45:14: Wafer missing in transfer chamber Message-ID: The previous user asked me to stop and claim the wafers before I use the chamber. When I came in, her run was not done yet, so I aborted the run and tried to move the wafer from transfer chamber to chmber F to cool it down. System gave an error: Chamber F is ignoring the cmmand. Afther this, I tried to move the wafer from transfer chamber to LLA, and system said there is no wafer on the blade. I claimed the wafers which were already in LLA, but one wafer was still missing. Probably the wafer is still in the tansfer chamber. From eenriquez at snf.stanford.edu Thu Aug 2 09:43:15 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 2 Aug 2012 09:43:15 -0700 Subject: Shutdown epi2 SNF 2012-08-01 23:45:14: Wafer missing in transfer chamber Message-ID: Unloaded wafer and left in unloade chamber A. From eenriquez at snf.stanford.edu Thu Aug 2 09:43:29 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 2 Aug 2012 09:43:29 -0700 Subject: Problem epi2 SNF 2012-08-01 23:44:14: Wafer missing Message-ID: Unloaded wafer and left in unloade chamber A. From tberg at snf.stanford.edu Mon Aug 6 06:28:11 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 6 Aug 2012 06:28:11 -0700 Subject: Problem epi2 SNF 2012-08-01 10:14:26: In cleaning step: pressure setpoint deviation fault Message-ID: System has been running for serveral days with no similar issues From tberg at stanford.edu Wed Aug 29 13:55:33 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 29 Aug 2012 13:55:33 -0700 Subject: No Phosphine overnight Message-ID: <503E81C5.7010005@stanford.edu> Hello All, we are doing some testing on the phosphine panel so there will be no phosphine to the epi overnight. Ted