Problem epi2 SNF 2012-08-01 10:14:26: In cleaning step: pressure setpoint deviation fault

sclaussen at snf.stanford.edu sclaussen at snf.stanford.edu
Wed Aug 1 10:14:26 PDT 2012


We had this problem during our initial cleanings of the chamber before running the wafers, but it was just a Warning. It faulted out after our first wafer. I brought the chamber out of isolation, and am trying it again.




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