From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-08-06 09:21:16: Ran GeEtchcoat for checkout Message-ID: <4341161.10.1344270076380.JavaMail.coral@shine> Ran GeEtchcoat for checkout no problem From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-08-09 08:01:38: Ran Etchcoat for checkout Message-ID: <15928122.84.1344524498632.JavaMail.coral@shine> Ran Etchcoat for checkout From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-08-09 12:46:38: TGO issue Message-ID: <29165396.94.1344541599379.JavaMail.coral@shine> From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-08-09 12:46:38: TGO issue Message-ID: <15392234.19.1344892967305.JavaMail.coral@shine> After swapping out parts and changing our version of software, Calcon has the CL96 communicating with the rest of the TGO system. From andig at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: andig at snf.stanford.edu (andig at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-08-13 20:52:43: Both etchcoat-chA do fault out Message-ID: <25695327.25.1344916364600.JavaMail.coral@shine> Ran etchcoat-cha-si and etchcoat-cha; Both fault out after a while of running at 1190C and at 1100C, respectively; water flow fault and heater contactor error messages; BTW: Not sure whether someone mis-programmed the 1190C? So how do we clean the chamber? From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-08-13 20:52:43: Both etchcoat-chA do fault out Message-ID: <5440614.31.1344961433498.JavaMail.coral@shine> Changed etch coat temp to 1080 and it ran through 2 times without problems From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-08-06 09:21:16: Ran GeEtchcoat for checkout Message-ID: <14670479.32.1344961441586.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-08-09 08:01:38: Ran Etchcoat for checkout Message-ID: <32014721.33.1344961450684.JavaMail.coral@shine> noted From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-08-14 09:25:54: Problem with Silane panel Message-ID: <10352765.34.1344961555703.JavaMail.coral@shine> High pressure isolation valve for Silane panel is bad NO SILANE at this time From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-08-14 09:25:54: Problem with Silane panel Message-ID: <9790061.39.1344971379523.JavaMail.coral@shine> High pressure isolation valve replaced Silane is ok now From cachang at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-08-16 09:25:49: Ch. A heater contactor error Message-ID: <661843.72.1345134349930.JavaMail.coral@shine> Saw this error during GE Etch Coat From eldwin at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-08-16 10:05:56: Ch. A Heater Contacter Issue. Message-ID: <24737989.78.1345136757215.JavaMail.coral@shine> Cleaning processes EtchCoat Ch. A & Ge EtchCoat failed. From eldwin at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-08-16 10:39:44: etchcoat ok at 1070C Message-ID: <9350980.88.1345138785875.JavaMail.coral@shine> maurice lowered the temperature for etchcoat chA recipe to 1070C and it runs now. I will need it to get to 1130C for future runs though. From eldwin at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-08-16 22:22:12: Heater Contactor problems Message-ID: <29332153.113.1345180932758.JavaMail.coral@shine> Won't run etch coat without aborting, even with etchcoat at 1070C. Tried a couple of times From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-08-17 15:17:51: main scrubber after power glitch Message-ID: <407934.147.1345241871152.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-08-17 15:17:51: main scrubber after power glitch Message-ID: <20084599.10.1345474571304.JavaMail.coral@shine> reset scrubber and burn box From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-08-16 22:22:12: Heater Contactor problems Message-ID: <13359250.63.1345509136758.JavaMail.coral@shine> Center H2O water flow meter replaced by AMAT after checking flows in each leg. Increased etch temperatures back to 1150c. Ran 4 etch with more errors. This was the first AMAT call under the new service contract. Good results! From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-08-16 10:39:44: etchcoat ok at 1070C Message-ID: <11944035.64.1345509152917.JavaMail.coral@shine> Center H2O water flow meter replaced by AMAT From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-08-16 10:05:56: Ch. A Heater Contacter Issue. Message-ID: <584992.65.1345509175146.JavaMail.coral@shine> Center H2O water flow meter replaced by AMAT after checking flows in each leg. Increased etch temperatures back to 1150c. Ran 4 etch with more errors. This was the first AMAT call under the new service contract. Good results! From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-08-16 09:25:49: Ch. A heater contactor error Message-ID: <14490353.66.1345509180204.JavaMail.coral@shine> Center H2O water flow meter replaced From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-07-24 11:42:42: ran "Mo ETCH" Message-ID: <4415821.67.1345509188293.JavaMail.coral@shine> logged From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-07-21 13:42:27: Ch. A Heater Contactor Error Message-ID: <18936831.68.1345509193351.JavaMail.coral@shine> Center H2O water flow meter replaced From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-05-07 06:11:05: Ge Etch Coat Step 8 Message-ID: <7521179.69.1345509199420.JavaMail.coral@shine> Center H2O water flow meter replaced From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-04-18 15:35:55: Ge etch program modified Message-ID: <4681217.70.1345509248889.JavaMail.coral@shine> Increased etch temperatures back to 1150c. From eldwin at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-08-21 00:33:44: heater contactor update Message-ID: <6517936.71.1345534424673.JavaMail.coral@shine> heater contactor / water flow issue occurred once while starting up and switching from cold idle to hot idle. But no problems were encountered after that. Was able to run recipes at 1130C without any issues. Thanks! From cachang at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-08-21 14:35:56: heater contactor problem Message-ID: <22591506.25.1345584957065.JavaMail.coral@shine> occurred when switching from cold idle to hot idle. Retry ok. From eldwin at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-08-22 18:27:22: found all dopant valves at the back open Message-ID: <7348270.71.1345685243331.JavaMail.coral@shine> closed and purged the line From eldwin at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-08-23 09:18:11: Ch A DC Motor Hardware Interlock Message-ID: <23252986.77.1345738692377.JavaMail.coral@shine> Getting the error above and process aborted during clean cycle From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-08-23 11:30:12: rotation problem Message-ID: <9579959.81.1345746613802.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-08-24 06:01:27: Applied was in Message-ID: <42128.103.1345813287792.JavaMail.coral@shine> Applied was in and is looking into the problem From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-08-23 11:30:12: rotation problem Message-ID: <4313531.53.1346193156017.JavaMail.coral@shine> AMAT resolved the interlock issue (installed capacitor on rotation, blown fuse replaced, cable connector repaired...) and Ted ran several etches on the tool to verify the fix. From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-08-23 09:18:11: Ch A DC Motor Hardware Interlock Message-ID: <10893111.54.1346193171027.JavaMail.coral@shine> AMAT resolved the interlock issue (installed capacitor on rotation, blown fuse replaced, cable connector repaired...) and Ted ran several etches on the tool to verify the fix. From andig at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: andig at snf.stanford.edu (andig at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-08-28 22:52:48: etch coat chA-Si fault and DCS not available Message-ID: <13519764.62.1346219569606.JavaMail.coral@shine> DCS WAS NOT RUNNING PROPERLY; got MFC N/F on gas panel; etch coat chA-Si faults out for temp excursions; even after i lowered the temperature to 1130C; HCl goes to vent and to etch in some steps, is this correct? From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-08-28 22:52:48: etch coat chA-Si fault and DCS not available Message-ID: <8030161.67.1346259917606.JavaMail.coral@shine> I ran 2 chamber a etch coats and one geetch coat. Silane and dcs both flowed fine neither recipe had issues with temp either. From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-08-29 13:50:31: No PH3 until tomorrow Message-ID: <26556925.83.1346273431960.JavaMail.coral@shine> Phosphine is down for testing on gas panel From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-08-29 13:50:31: No PH3 until tomorrow Message-ID: <29903438.106.1346337230111.JavaMail.coral@shine> phosphine test completed. phosphine is back on From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-08-24 06:01:27: Applied was in Message-ID: <33075208.107.1346337253180.JavaMail.coral@shine> resolved From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-08-22 18:27:22: found all dopant valves at the back open Message-ID: <16581162.108.1346337274188.JavaMail.coral@shine> resolved From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-08-21 00:33:44: heater contactor update Message-ID: <4541150.109.1346337299215.JavaMail.coral@shine> noted From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-08-30 12:06:21: ran ge etch Message-ID: <20295095.128.1346353582129.JavaMail.coral@shine> no problems From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-08-31 09:47:05: ran 2 etches Message-ID: <2243995.8.1346431625551.JavaMail.coral@shine> ran moetch and geetchcoat for checkout-no issues From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-09-05 09:11:43: ran Geetch coat for checkout Message-ID: <16844251.32.1346861504245.JavaMail.coral@shine> ran Geetch coat for checkout no problem From jthomp at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: jthomp at snf.stanford.edu (jthomp at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-09-06 07:06:44: DC motor hardware interlock fault Message-ID: <12181202.50.1346940404767.JavaMail.coral@shine> During the Ge etch, it aborted due to a DC motor interlock fault. I ran it again, and the etch and my first wafer were fine, but then it aborted due to the same fault during the etch after my first wafer. From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-09-06 11:21:06: rotation issues Message-ID: <11573865.53.1346955667828.JavaMail.coral@shine> Wafer lift position has changed and Field service is in to adjust and check it out From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-09-06 11:21:06: rotation issues Message-ID: <24781952.57.1346964109308.JavaMail.coral@shine> Adjusted lift hard stop, lift speeds and water flow sensor. running etch coat rotation is fine at this time From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-09-06 07:06:44: DC motor hardware interlock fault Message-ID: <23047852.59.1346966860477.JavaMail.coral@shine> Adjusted lift hard stop, lift speeds and water flow sensor. running etch coat rotation is fine at this time Ran Si deposition (kentest2 110sec ~1.54um) and Si etch. No rotation problem. From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-08-21 14:35:56: heater contactor problem Message-ID: <2563861.68.1347027761480.JavaMail.coral@shine> water flow OK From audet at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: audet at snf.stanford.edu (audet at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-09-09 08:24:11: wafer stuck in transfer chamber Message-ID: <27951681.0.1347204252349.JavaMail.coral@shine> Got error "Wafer too far off center for centerfinder to correct" when trying to transfer wafer to cooling chamber. Wafer now appears to be sitting in transfer chamber. Also, LLA will not respond to commands to close the door, possibly due to above error, and has been left open. From eldwin at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-09-09 13:25:20: wafer retrieved from transfer chamber Message-ID: <1511320.1.1347222320495.JavaMail.coral@shine> closed the door and backfilled in; was able to get the wafer out. can we bring the tool back up? From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-09-09 08:24:11: wafer stuck in transfer chamber Message-ID: <6772150.3.1347243871385.JavaMail.coral@shine> Eldwin retrieved wafer. Good save Eldwin! From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-09-10 11:58:58: ran Si etch Message-ID: <21293050.59.1347303538551.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-08-30 12:06:21: ran ge etch Message-ID: <27801104.95.1347457292176.JavaMail.coral@shine> noted From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-08-31 09:47:05: ran 2 etches Message-ID: <32673738.96.1347457305194.JavaMail.coral@shine> noted From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-09-05 09:11:43: ran Geetch coat for checkout Message-ID: <2754009.97.1347457315212.JavaMail.coral@shine> noted From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-09-09 13:25:20: wafer retrieved from transfer chamber Message-ID: <10906033.98.1347457329221.JavaMail.coral@shine> noted From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-09-10 11:58:58: ran Si etch Message-ID: <2085869.99.1347457345238.JavaMail.coral@shine> noted From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-09-12 09:06:44: ran Geetch coat for checkout Message-ID: <13629282.103.1347466004193.JavaMail.coral@shine> ran Geetch coat for checkout-no problem From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-09-13 05:55:50: 1% B2H6 change Message-ID: <22731741.130.1347540951612.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-09-13 07:58:07: cylinder change completed Message-ID: <22376551.134.1347548288529.JavaMail.coral@shine> cylinder change completed, in leak check From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-09-13 05:55:50: 1% B2H6 change Message-ID: <18270934.143.1347568494366.JavaMail.coral@shine> Cylinder changed, leak check Ok back on line From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-09-13 07:58:07: cylinder change completed Message-ID: <11998666.144.1347568504375.JavaMail.coral@shine> Cylinder changed, leak check Ok back on line From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-09-14 09:18:31: Ran Chamber a etch coat Si Message-ID: <12226510.2.1347639512067.JavaMail.coral@shine> Ran Chamber a etch coat Si no problem for checkout From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-09-14 10:15:39: No On display Message-ID: <7838041.2.1347642940829.JavaMail.coral@shine> The first BADGER interlock has been installed on Epi.It is totally functional with the exception of the on display. at this moment there is no visible indication at the tool but Coral will still report you as enabled. We are working on a solution to the display issue at this time. Thanks for your cooperation and patience.Ted From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-09-19 08:05:29: The Indicator for status is functional Message-ID: <30661468.29.1348067130084.JavaMail.coral@shine> The Indicator for status is functional. Red is disabled green is enabled. If you are having trouble differentiating please let a staff person know. we want to insure everyone can sense the status, if this scheme does not work we will explore other options From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-09-20 08:14:53: ran GEetch coat for checkout Message-ID: <5150304.76.1348154094300.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-09-21 10:05:46: GeH4 is getting low Message-ID: <25002217.8.1348247147722.JavaMail.coral@shine> GeH4 is getting low we will probably be changing it next week From andig at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: andig at snf.stanford.edu (andig at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-09-21 21:44:22: etch-coat-cha-si faulted Message-ID: <29265414.23.1348289063576.JavaMail.coral@shine> reported a maximum time at maximum power fault, two out of three times; From eldwin at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-09-24 00:07:46: etch-coat-chA works fine Message-ID: <1296173.6.1348470466971.JavaMail.coral@shine> Etch coat recipe using DCS (etch-coat-cha) instead of silane (etch-coat-cha-si) works fine. silane version of etch coat runs at 30kW, probably the cause for the maximum power/time error? From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-09-24 06:12:27: releasing reservations-GeH4 still OK Message-ID: <21153125.7.1348492348238.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-09-21 21:44:22: etch-coat-cha-si faulted Message-ID: <29631096.33.1348681805636.JavaMail.coral@shine> Looks like a recipe issue. Maurice corrected the recipe From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-09-24 00:07:46: etch-coat-chA works fine Message-ID: <19091265.34.1348681816756.JavaMail.coral@shine> noted From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-09-24 06:12:27: releasing reservations-GeH4 still OK Message-ID: <19862813.35.1348681824844.JavaMail.coral@shine> noted From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-09-14 10:15:39: No On display Message-ID: <820700.36.1348681844042.JavaMail.coral@shine> noted From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-09-12 09:06:44: ran Geetch coat for checkout Message-ID: <17804136.56.1348753610175.JavaMail.coral@shine> noted From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-09-14 09:18:31: Ran Chamber a etch coat Si Message-ID: <20368250.57.1348753620284.JavaMail.coral@shine> noted From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-09-20 08:14:53: ran GEetch coat for checkout Message-ID: <19445409.58.1348753637433.JavaMail.coral@shine> noted From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-09-27 08:18:04: Ran GEetch coat for checkout Message-ID: <24936497.63.1348759084632.JavaMail.coral@shine> Ran GEetch coat for checkout-no problem From jasonlin at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-09-28 14:25:29: Ch A bulb failed in upper outer zone Message-ID: <9083443.99.1348867530328.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-09-28 14:25:29: Ch A bulb failed in upper outer zone Message-ID: <29026998.7.1349110830462.JavaMail.coral@shine> Helped Ray replaced 4 upper zone lamps. Ran Ge Etchcoat recipe. From shott at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-01 18:38:11: Burnbox on old chamber ... Message-ID: <822564.18.1349141892232.JavaMail.coral@shine> Following the brief fire alarm, I have reset all gases, I believe. However, the burnbox for the old chamber won't turn back on. After repeated resets I could get it above 240C. but it wouldn't stay ignited.I suspect that the thermocouple needs to be extracted and cleaned, but that is above my skill level.I I think everything else is fine. Thanks, John From andig at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: andig at snf.stanford.edu (andig at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-01 19:33:40: scrubber fault - wafers stuck Message-ID: <1122254.21.1349145220881.JavaMail.coral@shine> cannot unload; waited for 1.5 hours for scrubber to come back up; please unload my wafers into the corresponding slots from LLA to box labeled test wafers; Thank you; From seymour at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-10-02 07:57:57: scrubber fault reset. Message-ID: <21142769.1.1349189878229.JavaMail.coral@shine> I did not remove wafer left in the tool. From andig at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: andig at snf.stanford.edu (andig at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-10-02 09:08:05: Will be in at 2pm Message-ID: <18586052.3.1349194085943.JavaMail.coral@shine> I will be in at 2 pm to remove my wafers from LLA; I will start running at that time anyways. Whose wafers are in LLB? From andig at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: andig at snf.stanford.edu (andig at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-02 19:58:39: dcs mfc faultet and is unstable Message-ID: <10436282.20.1349233120633.JavaMail.coral@shine> cost me another two essential wafers; this happened before because of the DCS MFC - can you please replace it? From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-02 19:58:39: dcs mfc faultet and is unstable Message-ID: <17336859.0.1349277248913.JavaMail.coral@shine> pumped out DCS line and ran geetch coat. DCS was stable From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-03 08:15:47: GERMANE cylinder changed Message-ID: <7579091.1.1349277347922.JavaMail.coral@shine> GERMANE cylinder changed in leak check. No Germane at the present From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-10-02 07:57:57: scrubber fault reset. Message-ID: <31616594.2.1349277368122.JavaMail.coral@shine> noted From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-01 19:33:40: scrubber fault - wafers stuck Message-ID: <18141583.3.1349277388320.JavaMail.coral@shine> reset From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-01 18:38:11: Burnbox on old chamber ... Message-ID: <29203939.4.1349277397418.JavaMail.coral@shine> reset From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-09-21 10:05:46: GeH4 is getting low Message-ID: <32453138.5.1349277461048.JavaMail.coral@shine> cyllinder change in progress From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-03 08:15:47: GERMANE cylinder changed Message-ID: <2236289.12.1349296197288.JavaMail.coral@shine> Cylinder replaced And leak checked back in service From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-03 15:56:14: need logsheets Message-ID: <33537070.14.1349304975034.JavaMail.coral@shine> From jasonlin at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-03 16:07:18: Disruption in DCS Message-ID: <19658581.15.1349305639346.JavaMail.coral@shine> DCS deviation by 100% during 2nd Ge Etch Coat. Resetted chamber, looks okay again, DCS flowing okay for now. From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-10-02 09:08:05: Will be in at 2pm Message-ID: <10371010.16.1349463095544.JavaMail.coral@shine> noted From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-03 16:07:18: Disruption in DCS Message-ID: <3221303.17.1349463135953.JavaMail.coral@shine> temp has stabilized and so has flow From junam at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-08 12:23:50: wafer stuck in Ca A, LLA door cannot be closed Message-ID: <24604537.26.1349724231249.JavaMail.coral@shine> "Ch A pressure deviation error" occurred during my run, and wafer stuck in Ch A. Aborted the sequencer and claimed the wafers in LLA, but cannot close LLA, "LLA busy or not ready." From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-08 12:23:50: wafer stuck in Ca A, LLA door cannot be closed Message-ID: <21514890.0.1349728246606.JavaMail.coral@shine> Did a global reset manually moved wafer from Cha to LLB From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-03 15:56:14: need logsheets Message-ID: <15498388.9.1349739566879.JavaMail.coral@shine> new logsheets added to logbook From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-10-09 02:03:52: TGO system in fault Message-ID: <9964338.12.1349773433699.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-10-09 02:03:52: TGO system in fault Message-ID: <10436245.0.1349790785926.JavaMail.coral@shine> TGO CL96 is functional again From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-10-09 13:47:25: Changed backup DCS Cylinder Message-ID: <18546164.22.1349815645938.JavaMail.coral@shine> Changed backup DCS Cylinder From andig at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: andig at snf.stanford.edu (andig at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-09 14:49:57: chA "isolated" Message-ID: <1566281.28.1349819398506.JavaMail.coral@shine> Arrived and found chA in status "isolated"! I don't know how to recover from that status; From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-09 14:49:57: chA "isolated" Message-ID: <1957001.32.1349825899768.JavaMail.coral@shine> Found H2 pressure too high. System would not go online with H2 high. (What did AMAT do?) Put system in a cycle purge mode and bled H2 down. Once H2 was in range we were able to bring tool online normally From jasonlin at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-09 21:55:11: Isolated State Message-ID: <7793690.35.1349844911911.JavaMail.coral@shine> Cannot get it back to Inert Idle From taotang at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: taotang at snf.stanford.edu (taotang at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-10 03:24:45: CHA offline Message-ID: <24479141.38.1349864685394.JavaMail.coral@shine> Can not bring CHA online. From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-10-10 06:49:30: cannot put chamber on line Message-ID: <9774544.39.1349876971430.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-10-10 08:32:20: FS will be in around Noon Message-ID: <5251354.42.1349883140729.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-10-10 09:42:43: Looks like H2 reg is creeping Message-ID: <11890055.46.1349887364026.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-10-10 06:49:30: cannot put chamber on line Message-ID: <12253265.54.1349897701962.JavaMail.coral@shine> H2 regulator is creeping, if it gets too high it will fault. it is fine when running so we will leave it in problem until regulator can be changed From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-09 21:55:11: Isolated State Message-ID: <4515255.55.1349897776692.JavaMail.coral@shine> H2 regulator is creeping, if it gets too high it will fault. it is fine when running so we will leave it in problem until regulator can be changed From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-10-10 08:32:20: FS will be in around Noon Message-ID: <328394.56.1349897785780.JavaMail.coral@shine> H2 regulator is creeping, if it gets too high it will fault. it is fine when running so we will leave it in problem until regulator can be changed From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-10 03:24:45: CHA offline Message-ID: <18169978.57.1349897795879.JavaMail.coral@shine> H2 regulator is creeping, if it gets too high it will fault. it is fine when running so we will leave it in problem until regulator can be changed From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-10 12:36:56: H2 regulator creeps Message-ID: <2221663.58.1349897817096.JavaMail.coral@shine> H2 regulator is creeping, if it gets too high it will fault. it is fine when running so we will leave it in problem until regulator can be changed From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-10-10 15:32:05: H2 regulator is creeping Message-ID: <30289880.61.1349908325294.JavaMail.coral@shine> H2 regulator is creeping, if it gets too high it will fault. From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-10-11 12:59:39: Running Epi in Community service mode Message-ID: <23041588.88.1349985580178.JavaMail.coral@shine> Hello All, as we said we have a work around for the H2 problem . The Tool will stay in cold idle as long as it is enabled. so John has created a community service account that allows us to keep it up and not charge the users.In order to keep track there is amanual sheet that shows if you are using it or not. You must enable in your normal account when running and enable over yourself with community service when finished. DO NOT DISABLE From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-10-10 15:32:05: H2 regulator is creeping Message-ID: <12443862.89.1349985595336.JavaMail.coral@shine> work around From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-10-16 16:41:43: Replacing H2 regulator assembly Message-ID: <5553705.56.1350430904133.JavaMail.coral@shine> The regulator assemply has been replaced be AMAT FS but the pressure transducer connector doesn't match our system. AMAT will return tomorrow with new parts. From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-10-16 16:41:43: Replacing H2 regulator assembly Message-ID: <27890325.7.1350498200773.JavaMail.coral@shine> Replaced H2 regulator assy. Still has creep so we will continue to run as before. Keep in cold idle and enable in community service when your run is finished From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-10-22 12:08:15: HCl changed to other cylinder Message-ID: <31824916.16.1350932896152.JavaMail.coral@shine> HCl changed to other cylinder From kcbalram at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-23 06:34:51: Ch A lower setpoint deviation fault Message-ID: <2896157.33.1350999291647.JavaMail.coral@shine> Additional errors on the fault screen: Fatal fault of wafer from load lock A slot 8-258 Chamber A is not ready to send wafer Krishna From jasonlin at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-25 10:40:25: Particles on wafer backside Message-ID: <30960173.88.1351186825420.JavaMail.coral@shine> Lots of brownish-black particles on the wafer backside. Might be a problem inside the chamber or susceptor. From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-10-26 14:19:54: Changed reg assy still creeps Message-ID: <9621386.149.1351286395383.JavaMail.coral@shine> Changed reg assy still creeps. same procedure as before From yjhuo at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: yjhuo at snf.stanford.edu (yjhuo at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-28 12:25:19: Error message Message-ID: <9138768.2.1351452319578.JavaMail.coral@shine> "Chamber A bulb failed in UPPER OUTER zone." Cannot run Ge Etch Coat ::: any more. From junam at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-29 02:21:57: bulb failure Message-ID: <5684814.7.1351502518343.JavaMail.coral@shine> Ch A bulb failure upper outer zone From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-10-29 06:21:05: bad lamps Message-ID: <6079958.8.1351516866681.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-29 02:21:57: bulb failure Message-ID: <19219546.10.1351524229311.JavaMail.coral@shine> Replaced bad lamps, Ran Geetch coat and also Moetch From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-10-29 06:21:05: bad lamps Message-ID: <29738240.11.1351524239341.JavaMail.coral@shine> Replaced bad lamps, Ran Geetch coat and also Moetch From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-28 12:25:19: Error message Message-ID: <31559308.12.1351524257359.JavaMail.coral@shine> Replaced bad lamps, Ran Geetch coat and also Moetch From sclaussen at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-30 12:55:21: Large particles on wafer surface Message-ID: <5220770.64.1351626921578.JavaMail.coral@shine> Large, sparse particles (visible by eye) on the top of 4/5 of our wafers from this morning. They do not seem to originate in the epitaxy (though of course it's difficult to say). I have the wafers, if the staff wants to inspect them. From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-10-31 07:16:01: Ran Geetch coat for checkout Message-ID: <3768920.96.1351692961800.JavaMail.coral@shine> Ran Geetch coat for checkout no problem From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-09-19 08:05:29: The Indicator for status is functional Message-ID: <20296509.97.1351692973807.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-09-27 08:18:04: Ran GEetch coat for checkout Message-ID: <20631583.98.1351692992815.JavaMail.coral@shine> Noted From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-10-09 13:47:25: Changed backup DCS Cylinder Message-ID: <1653611.99.1351693001822.JavaMail.coral@shine> Noted From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-11-02 13:45:11: Do NOT Disable Message-ID: <14977391.180.1351889111203.JavaMail.coral@shine> Hello All, as we said we have a work around for the H2 problem . The Tool will stay in cold idle as long as it is enabled. so John has created a community service account that allows us to keep it up and not charge the users.In order to keep track there is amanual sheet that shows if you are using it or not. You must enable in your normal account when running and enable over yourself with community service when finished. DO NOT DISABLE From jasonlin at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-11-03 13:23:21: Pressure Setpoint Fault Message-ID: <17212423.228.1351974202342.JavaMail.coral@shine> During Ge Etch Coat From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-10-11 12:59:39: Running Epi in Community service mode Message-ID: <15412115.12.1352125778390.JavaMail.coral@shine> noted From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-10-22 12:08:15: HCl changed to other cylinder Message-ID: <13161652.13.1352125788418.JavaMail.coral@shine> noted From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-10 12:36:56: H2 regulator creeps Message-ID: <28204248.23.1352146659139.JavaMail.coral@shine> replaced H2 stick and leak tested. ran geetch coat no problem From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-10-10 09:42:43: Looks like H2 reg is creeping Message-ID: <20365159.28.1352150667876.JavaMail.coral@shine> Replaced H2 stick leak checked watched regulator did not see creep in 10 minutes. Ran 2 Geetch coats with no problems From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-11-02 13:45:11: Do NOT Disable Message-ID: <24863915.29.1352150712965.JavaMail.coral@shine> Replaced H2 stick leak checked watched regulator did not see creep in 10 minutes. Ran 2 Geetch coats with no problems. It is OK to operate in normal mode now. From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-11-03 13:23:21: Pressure Setpoint Fault Message-ID: <25895372.30.1352150729044.JavaMail.coral@shine> Replaced H2 stick leak checked watched regulator did not see creep in 10 minutes. Ran 2 Geetch coats with no problems. It is OK to operate in normal mode now. From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-10-26 14:19:54: Changed reg assy still creeps Message-ID: <2365186.31.1352150746102.JavaMail.coral@shine> Replaced H2 stick leak checked watched regulator did not see creep in 10 minutes. Ran 2 Geetch coats with no problems. It is OK to operate in normal mode now. From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-10-31 07:16:01: Ran Geetch coat for checkout Message-ID: <32765671.32.1352150914524.JavaMail.coral@shine> noted From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-23 06:34:51: Ch A lower setpoint deviation fault Message-ID: <10135396.7.1352221578593.JavaMail.coral@shine> problem has not happened again confirmed with user From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-10-25 10:40:25: Particles on wafer backside Message-ID: <15564049.8.1352221799209.JavaMail.coral@shine> No other reports of backside particles From junam at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-11-06 22:14:19: HCL deviation error: cannot run cleaning recipe Message-ID: <5956222.39.1352268860232.JavaMail.coral@shine> HCL flow deviated 99%, and cannot run chamber cleaning recipe From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-11-06 22:14:19: HCL deviation error: cannot run cleaning recipe Message-ID: <11816628.1.1352299563632.JavaMail.coral@shine> Switched to backup cylinder ran ChamberA etch coat no problem From alsune at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-11-08 03:11:44: Epi chamber error Message-ID: <10299881.26.1352373105938.JavaMail.coral@shine> Epi chamber failed printing that chamber A light bulb failing in the upper inner zone. From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-11-08 03:11:44: Epi chamber error Message-ID: <26215754.27.1352395242509.JavaMail.coral@shine> Replaced 4 bad lamps and ran GEetch coat no problems. Chamber leak rate test -leak rate was 10.6mT per minute From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-11-08 10:59:30: Running long leak rate Message-ID: <15111929.36.1352401170326.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-11-08 12:21:25: long leak rate results Message-ID: <19009236.38.1352406085145.JavaMail.coral@shine> 30 min pump-30 min leak rate 6.8 mT/ min leak From alsune at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-11-11 20:10:05: LLA cassette dirty Message-ID: <20497300.10.1352693406002.JavaMail.coral@shine> The black particle on the wafer after epi seems to originate from the black cassette. Looking into the edges of the cassette the burnt mark is clearly visible. I think some users got the wafer into LLA before cooling it. Would it be possible to replace the cassette? I've blown the dust away the particle with N2 gun for now but worried that this would get worse. From cachang at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-11-11 21:08:08: Hot idle chamber temperature Message-ID: <28562961.11.1352696888786.JavaMail.coral@shine> In hot idle for longer than 30mins, the chamber temperature is still lower than 300C. From cachang at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-11-11 21:37:51: Hot idle temperature issue Message-ID: <17305650.12.1352698671567.JavaMail.coral@shine> Tried to go to cold idle and then hot idle again. Temperature was still below 300C after 15mins in hot idle. Could not process. From junam at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-11-11 22:07:36: Cannot bring up the chamber temperature Message-ID: <20154475.13.1352700456358.JavaMail.coral@shine> After putting the chamber in "hot idle" mode, I cannot hear the usual powering-up sound. After waiting for 20~30 mins, I still cannot raise the chamber temperature higher than 300 oC. From junam at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-11-11 22:58:21: temperature control issues Message-ID: <5810423.14.1352703502527.JavaMail.coral@shine> cannot bring up ChA temperature above 300 oC after putting it into the hot idle mode From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-11-11 21:08:08: Hot idle chamber temperature Message-ID: <4798195.2.1352745664755.JavaMail.coral@shine> Adjusted active idle power to 6kw from 5kw . It heated up fine. Ran 2 Geetchcoats no problem. From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-11-11 21:37:51: Hot idle temperature issue Message-ID: <1056001.3.1352745680783.JavaMail.coral@shine> Adjusted active idle power to 6kw from 5kw . It heated up fine. Ran 2 Geetchcoats no problem. From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-11-11 22:07:36: Cannot bring up the chamber temperature Message-ID: <10597607.4.1352745689831.JavaMail.coral@shine> Adjusted active idle power to 6kw from 5kw . It heated up fine. Ran 2 Geetchcoats no problem. From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-11-11 22:58:21: temperature control issues Message-ID: <3645516.5.1352745698851.JavaMail.coral@shine> Adjusted active idle power to 6kw from 5kw . It heated up fine. Ran 2 Geetchcoats no problem. From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-11-12 10:42:09: Cassettes ordered Message-ID: <6612402.6.1352745730859.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-11-12 12:31:55: GeH4 is very low. Do not run critical runs Message-ID: <22616909.11.1352752315718.JavaMail.coral@shine> GeH4 is very low. Do not run critical runs From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-11-12 12:31:55: GeH4 is very low. Do not run critical runs Message-ID: <21657544.105.1353075206977.JavaMail.coral@shine> GeH4 should be here today. it is empty now From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-11-16 06:13:53: GeH4 should be here today Message-ID: <23297512.106.1353075234056.JavaMail.coral@shine> It is empty now From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-11-16 07:30:42: ran Geetch coat no problem Message-ID: <27286831.107.1353079843223.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-11-16 12:29:04: GeH4 cylinder installed-Leak check Message-ID: <32978106.126.1353097745134.JavaMail.coral@shine> From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-11-16 12:29:04: GeH4 cylinder installed-Leak check Message-ID: <15448142.129.1353106761846.JavaMail.coral@shine> Leak check good. Cylinder open. Delivery pressure set at 15psi. Flowed through reactor. -ray and maurice From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-11-16 06:13:53: GeH4 should be here today Message-ID: <9845876.130.1353106781864.JavaMail.coral@shine> cylinder replaced From eldwin at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-11-20 13:01:33: EtchCoat Ch.A fault Message-ID: <24803078.0.1353445294280.JavaMail.coral@shine> Recipe Etch Coat Ch.A fails with "Max time at max power temperature" fault during the step "lower dome etch" at 1100C. I don't recall this step being there before - is it ok to run this step at a lower temperature? From eldwin at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-11-21 15:32:50: Ch A bulb failed in upper outer zone Message-ID: <16065256.5.1353540770982.JavaMail.coral@shine> From eldwin at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-11-21 15:47:32: bulb failed; see above Message-ID: <19868466.7.1353541652517.JavaMail.coral@shine> From seymour at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-11-21 15:32:50: Ch A bulb failed in upper outer zone Message-ID: <23412996.21.1353955471373.JavaMail.coral@shine> replaced faulty lamps From seymour at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-11-21 15:47:32: bulb failed; see above Message-ID: <24799526.23.1353955514819.JavaMail.coral@shine> replaced faulty top lamps From kcbalram at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-11-26 11:44:38: Water leak detected Message-ID: <5860394.32.1353959079058.JavaMail.coral@shine> System gave an error saying water leak detected when I tried to put it into hot idle Best, Krishna From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-11-26 11:44:38: Water leak detected Message-ID: <8228347.45.1353969703086.JavaMail.coral@shine> let water dry from lamp change. global reset From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Problem epi2 SNF 2012-11-20 13:01:33: EtchCoat Ch.A fault Message-ID: <317104.46.1353969715215.JavaMail.coral@shine> let water dry from lamp change. global reset From maurice at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-11-16 07:30:42: ran Geetch coat no problem Message-ID: <352840.47.1353969727333.JavaMail.coral@shine> logged From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-11-30 07:35:58: applied work Message-ID: <12968500.14.1354289759078.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-11-30 07:35:58: applied work Message-ID: <14798047.4.1354310319169.JavaMail.coral@shine> PM will begin on Monday. OK for non critical work From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-11-30 13:20:02: Major PM on Monday Message-ID: <8349170.5.1354310402980.JavaMail.coral@shine> PM will begin on Monday. OK for non critical work until then From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Shutdown epi2 SNF 2012-12-04 11:22:28: pm in progress Message-ID: <13852511.7.1354648948720.JavaMail.coral@shine> From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-12-05 14:01:55: no progress on PM Message-ID: <1610695.35.1354744915789.JavaMail.coral@shine> Parts ordered for PM no progress on PM today From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-12-06 11:58:19: lamps replaced in lower module Message-ID: <33093832.0.1354823900649.JavaMail.coral@shine> lamps replaced in lower module. assembly in progress From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-12-11 06:27:49: Not much progress Message-ID: <24825033.38.1355236070033.JavaMail.coral@shine> Not much progress on Epi-waiting for parts ordered as down. Hopefully assembly will begin today. From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-12-12 14:00:28: System going back together Message-ID: <6581243.5.1355349629306.JavaMail.coral@shine> All parts are in house now and assembly has begun. Lower dome is on and lower lamp module is going back on next From tberg at stanford.edu Wed Dec 12 14:01:40 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 12 Dec 2012 14:01:40 -0800 Subject: System is going back together Message-ID: <50C8FEC4.2040900@stanford.edu> All parts are in house now and assembly has begun. Lower dome is on and lower lamp module is going back on next . Still a long way to go. Ted From tberg at stanford.edu Thu Dec 13 12:32:01 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 13 Dec 2012 12:32:01 -0800 Subject: Current Epi status Message-ID: <50CA3B41.6020204@stanford.edu> Hello, Applied has installed the lower dome and lower lamp module. They are working on rebuilding the rotation assembly. Progress has been somewhat slow waiting for parts and personnel. If things go smoothly there is a chance it will be up but just barely before the shutdown. I would not count on it as we will have to do some testing before it is released.Ted From tberg at stanford.edu Mon Dec 17 06:40:19 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 17 Dec 2012 06:40:19 -0800 Subject: Epi Status Message-ID: <50CF2ED3.3010507@stanford.edu> Hello All, Just a brief update on Epi Status. Applied was able to complete the rebuild of the Rotation assembly but was unable to perform leak testing. One item (a Fastener & its Nut Rotation Assembly) from the Dome Clamp was lost in the MF during disassembly/removal of the Rotation and they were unable to locate it Friday. The parts were ordered and they will be on-site Monday Dec. 17. Once the Rotation passes leak testing, assembly of the chamber can be completed. From tberg at snf.stanford.edu Sun Dec 23 08:52:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Sun, 23 Dec 2012 16:52:21 -0000 Subject: Comment epi2 SNF 2012-12-18 10:08:08: Applied is here Message-ID: <6693276.82.1355854089312.JavaMail.coral@shine> Applied is here working on the rotation From tberg at stanford.edu Fri Dec 21 11:13:24 2012 From: tberg at stanford.edu (tberg at stanford.edu) Date: Fri, 21 Dec 2012 11:13:24 -0800 (PST) Subject: [epi2-pcs] Comment epi2 SNF 2012-12-21 11:13:24: Epi is back together and pumping Message-ID: <22762940.0.1356117204961.JavaMail.coral@snc-coraldb.stanford.edu> Epi is back together and pumping. It is in a long pump down and leak check