Problem epi2 SNF 2012-08-13 20:52:43: Both etchcoat-chA do fault out

andig at snf.stanford.edu andig at snf.stanford.edu
Sun Dec 23 08:52:21 PST 2012


Ran etchcoat-cha-si and etchcoat-cha; Both fault out after a while of running at 1190C and at 1100C, respectively;  water flow fault  and heater contactor error messages;
BTW: Not sure whether someone mis-programmed the 1190C?
So how do we clean the chamber?



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