Problem epi2 SNF 2012-08-16 10:05:56: Ch. A Heater Contacter Issue.

maurice at snf.stanford.edu maurice at snf.stanford.edu
Sun Dec 23 08:52:21 PST 2012


Center H2O water flow meter replaced by AMAT after checking flows in each leg.  Increased etch temperatures back to 1150c.  Ran 4 etch with more errors.
This was the first AMAT call under the new service contract.  Good results!



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