Comment epi2 SNF 2012-04-18 15:35:55: Ge etch program modified
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Sun Dec 23 08:52:21 PST 2012
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Comment epi2 SNF 2012-05-07 06:11:05: Ge Etch Coat Step 8
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Increased etch temperatures back to 1150c.
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Comment epi2 SNF 2012-05-07 06:11:05: Ge Etch Coat Step 8
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Comment epi2 SNF 2012-08-21 00:33:44: heater contactor update
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