Problem epi2 SNF 2012-08-28 22:52:48: etch coat chA-Si fault and DCS not available

andig at snf.stanford.edu andig at snf.stanford.edu
Sun Dec 23 08:52:21 PST 2012


DCS WAS NOT RUNNING PROPERLY; got MFC N/F on gas panel;
etch coat chA-Si faults out for temp excursions; even after i lowered the temperature to 1130C;
HCl goes  to vent and to etch in some steps, is this correct?



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