Problem epi2 SNF 2012-08-28 22:52:48: etch coat chA-Si fault and DCS not available

[andig at snf.stanford.edu]

DCS WAS NOT RUNNING PROPERLY; got MFC N/F on gas panel;
etch coat chA-Si faults out for temp excursions; even after i lowered the temperature to 1130C;
HCl goes  to vent and to etch in some steps, is this correct?