Problem epi2 SNF 2012-08-28 22:52:48: etch coat chA-Si fault and DCS not available

tberg at snf.stanford.edu tberg at snf.stanford.edu
Sun Dec 23 08:52:21 PST 2012


I ran 2 chamber a etch coats and one geetch coat. Silane and dcs both flowed fine neither recipe had issues with temp either.



More information about the epi2-pcs mailing list