Problem epi2 SNF 2012-08-29 13:50:31: No PH3 until tomorrow
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Sun Dec 23 08:52:21 PST 2012
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Problem epi2 SNF 2012-08-28 22:52:48: etch coat chA-Si fault and DCS not available
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Problem epi2 SNF 2012-08-29 13:50:31: No PH3 until tomorrow
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Phosphine is down for testing on gas panel
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Problem epi2 SNF 2012-08-28 22:52:48: etch coat chA-Si fault and DCS not available
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Problem epi2 SNF 2012-08-29 13:50:31: No PH3 until tomorrow
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