Problem epi2 SNF 2012-09-06 07:06:44: DC motor hardware interlock fault

jthomp at snf.stanford.edu jthomp at snf.stanford.edu
Sun Dec 23 08:52:21 PST 2012


During the Ge etch, it aborted due to a DC motor interlock fault. I ran it again, and the etch and my first wafer were fine, but then it aborted due to the same fault during the etch after my first wafer.



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