Problem epi2 SNF 2012-09-06 07:06:44: DC motor hardware interlock fault

maurice at snf.stanford.edu maurice at snf.stanford.edu
Sun Dec 23 08:52:21 PST 2012


Adjusted lift hard stop, lift speeds and water flow sensor. running etch coat rotation is fine at this time
Ran Si deposition (kentest2  110sec  ~1.54um) and Si etch.  No rotation problem.



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