Shutdown epi2 SNF 2012-09-09 08:24:11: wafer stuck in transfer chamber

audet at snf.stanford.edu audet at snf.stanford.edu
Sun Dec 23 08:52:21 PST 2012


Got error "Wafer too far off center for centerfinder to correct" when trying to transfer wafer to cooling chamber.  Wafer now appears to be sitting in transfer chamber.  Also, LLA will not respond to commands to close the door, possibly due to above error, and has been left open.



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