Comment epi2 SNF 2012-09-24 00:07:46: etch-coat-chA works fine

eldwin at eldwin at
Sun Dec 23 08:52:21 PST 2012

Etch coat recipe using DCS (etch-coat-cha) instead of silane (etch-coat-cha-si) works fine. silane version of etch coat runs at 30kW, probably the cause for the maximum power/time error?

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