Comment epi2 SNF 2012-09-24 00:07:46: etch-coat-chA works fine

eldwin at snf.stanford.edu eldwin at snf.stanford.edu
Sun Dec 23 08:52:21 PST 2012


Etch coat recipe using DCS (etch-coat-cha) instead of silane (etch-coat-cha-si) works fine. silane version of etch coat runs at 30kW, probably the cause for the maximum power/time error?



More information about the epi2-pcs mailing list