Problem epi2 SNF 2012-09-21 21:44:22: etch-coat-cha-si faulted
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Sun Dec 23 08:52:21 PST 2012
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Problem epi2 SNF 2012-09-21 21:44:22: etch-coat-cha-si faulted
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Comment epi2 SNF 2012-09-24 00:07:46: etch-coat-chA works fine
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Looks like a recipe issue. Maurice corrected the recipe
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Problem epi2 SNF 2012-09-21 21:44:22: etch-coat-cha-si faulted
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Comment epi2 SNF 2012-09-24 00:07:46: etch-coat-chA works fine
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