Problem epi2 SNF 2012-10-01 19:33:40: scrubber fault - wafers stuck

andig at andig at
Sun Dec 23 08:52:21 PST 2012

cannot unload; waited for 1.5 hours for scrubber to come back up; please unload my wafers into the corresponding slots from LLA to box labeled test wafers; Thank you;

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